Polymer-Assisted Pressure Sensor with Piezoresistive Suspended Graphene and Its Temperature Characteristics

Xin Lin; Ying Liu; Yong Zhang; Peng Yang; Xianzhe Cheng; Jing Qiu; Guanjun Liu

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자료유형: 학술저널

저자정보: Xin Lin (National University of Defense Technology) Ying Liu (National University of Defense Technology) Yong Zhang (National University of Defense Technology) Peng Yang (National University of Defense Technology) Xianzhe Cheng (National University of Defense Technology) Jing Qiu (National University of Defense Technology) Guanjun Liu (National University of Defense Technology)

저널정보: 성균관대학교 성균나노과학기술원 NANO NANO Vol.14 No.10

발행연도: 2019.1

수록면: 81 - 87 (7page)

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A polymer-assisted pressure sensor with piezoresistive suspended graphene is proposed and fabricated with high yield. Our sensor exhibits a good pressure response comparable to that of commercial sensors. The sensitivity is estimated to be 2.87 x 10 -5 kPa -1, higher than that of similar Si-based pressure sensors. The influence of the temperature on the sensor performance is systematically analyzed. An inverse temperature response is observed, and a nonnegligible temperature effect on the sensor resistance is demonstrated. Considering the temperature-induced cavity pressure change, a new temperature–resistance model is built to explain the nonlinearity of the sensor response to the temperature variation. Experiments under different test voltages show the influence of the current thermal effect, which is similar to that of temperature and nonnegligible for high-precision pressure sensors. Our new sensor holds great potential for practical application, and the findings on the temperature characteristics open up a route to further improve the sensor performance.

#Graphene #piezoresistive pressure sensor #temperature characteristics

참고문헌 (33)

참고문헌 신청

Dustin Chen / 2017 / Electronic Muscles and Skins: A Review of Soft Sensors and Actuators / Chemical Reviews 117(17):11239~11268

Alex Chortos / 2016 / Pursuing prosthetic electronic skin / Nature Materials 15(9):937~950

Nanshu Lu / 2014 / Flexible and Stretchable Electronics Paving the Way for Soft Robotics / Soft Robotics 1(1):53~62

Yunjing Lu / 2019 / Highly sensitive wearable 3D piezoresistive pressure sensors based on graphene coated isotropic non-woven substrate / Composites Part A: Applied Science and Manufacturing 117:202~210

Yuji Gao / 2017 / Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring / Advanced Materials 29(39):1701985

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