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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.5
- 발행연도
- 2017.9
- 수록면
- 114 - 117 (4page)
이용수
초록· 키워드
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Plasma characteristics of two-dimensional inductively coupled discharge simulation is investigated. Impedance of an inductively coupled plasma discharge was considered. Voltage drops across antenna coils and current variation between coils made different profiles of plasma characteristics. Importance of the capacitive field effect in some case was analyzed.
목차
Abstract
I. Introduction
II. Modeling Methods
III. Results and Discussion
IV. Summary
References
참고문헌 (5)
참고문헌 신청
D. B. Graves, IEEE Trans. Plasma Sci. 22, 31(1994).
N. Gupta, and G. R. G Raju, IEEE Trans. Dielec. Electr. Instr. 7, 705 (2000).
T. Kitajima, Y. Takeo, Z. L. Petrovic, and T. Makabe, J. Appl. Phys. 77, 489 (2000).
J. D. Jackson, Classical Electrodynamics (John Wiley & Sons, NJ, 1999), pp. 264-267.
Y. Jeong, Y.J. Lee, D.C. Kwon, and H. Choe, Curr. Appl. Phys. 17 403 (2017).
Y. Jeong, Y.J. Lee, D.C. Kwon, and H. Choe, Curr. Appl. Phys. 17 403 (2017).
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UCI(KEPA) : I410-ECN-0101-2019-420-001276665