메뉴 건너뛰기
.. 내서재 .. 알림
소속 기관/학교 인증
인증하면 논문, 학술자료 등을  무료로 열람할 수 있어요.
한국대학교, 누리자동차, 시립도서관 등 나의 기관을 확인해보세요
(국내 대학 90% 이상 구독 중)
로그인 회원가입 고객센터 ENG
주제분류
인문학
인문학 일반 역사학 철학 종교학 어문학 기타 인문학
사회과학
사회과학 일반 경영학 관광학 교육학 군사학 문헌정보학 법학 사회학 신문방송학 심리과학 정치외교학 지리학 행정학 경제학 무역학 인류학 기타 사회과학
자연과학
자연과학 일반 물리학 생물학 생활과학 수학·통계학 천문학 지구과학 화학 기타 자연과학
공학
공학 일반 건축공학 기계공학 산업공학 재료·에너지공학 전기전자공학 조선해양공학 화학공학 컴퓨터학 기타공학
의약학
의학 일반 간호학 수의학 약학 한의학 기초의학 임상의학 기타 의약학
농수해양학
농수해양학 일반 농학 수산학 식품과학 임학 축산학 해상운송학 기타 농수해양학
예술체육학
예술 일반 디자인 미술 미용 사진 음악학 의상 체육 공연매체예술 기타 예술체육학
복합학
학제간연구 과학기술학 뇌인지과학 기술정책 기타 복합학

ENG

추천
검색
질문

논문 기본 정보

자료유형
학술저널
저자정보
Jae-Soo Shin (DaeJeon University) Minjoong Kim (DaeJeon University) Je-beom Song (Korea Research Institute of Standards and Science) Nak-gwan Jeong (Korea Research Institute of Standards and Science) Jin-tae Kim (Korea Research Institute of Standards and Science) Ju-Young Yun (Korea Research Institute of Standards and Science)
저널정보
한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.27 No.1
발행연도
2018.1
수록면
9 - 13 (5page)

이용수

표지
📌
연구주제
📖
연구배경
🔬
연구방법
🏆
연구결과
AI에게 요청하기
추천
검색
질문

초록· 키워드

오류제보하기
Samples of anodic oxide film used in semiconductor and display manufacturing processes were prepared at different electrolyte temperatures to investigate the corrosion resistance. The anodic oxide film was grown on aluminum alloy 6061 by using a sulfuric acid (H₂SO₄) electrolyte of 1.5M at 0℃, 5℃, 10℃, 15℃, and 20℃. The insulating properties of the samples were evaluated by measuring the breakdown voltage, which gradually increased from 0.43 ㎸ (0℃) to 0.52 ㎸ (5℃), 1.02 ㎸ (10℃), and 1.46 ㎸ (15℃) as the electrolyte temperature was increased from 0℃ to 15℃, but then decreased to 1.24 ㎸ (20℃). To evaluate the erosion of the film by fluorine plasma, the plasma erosion and the contamination particles were measured. The plasma erosion was evaluated by measuring the breakdown voltage after exposing the film to CF₄/O₂/Ar and NF₃/O₂/Ar plasmas. With exposure to CF₄/O₂/Ar plasma, the breakdown voltage of the film slightly decreased at 0℃, by 0.41 ㎸; however, the breakdown voltage significantly decreased at 20℃, by 0.83 ㎸. With exposure to NF₃/O₂/Ar plasma, the breakdown voltage of the film slightly decreased at 0℃, by 0.38 ㎸; however, the breakdown voltage significantly decreased at 20℃, by 0. 77 ㎸. In addition, for the entire temperature range, the breakdown voltage decreased more when sample was exposed to NF₃/O₂/Ar plasma than to CF₄/O₂/Ar plasma. The decrease of the breakdown voltage was lower in the anodic oxide film samples that were grown slowly at lower temperatures. The rate of breakdown voltage decrease after exposure to fluorine plasma was highest at 20℃, indicating that the anodic oxide film was most vulnerable to erosion by fluorine plasma at that temperature. Contamination particles generated by exposure to the CF₄/O₂/Ar and NF₃/O₂/Ar plasmas were measured on a real-time basis. The number of contamination particles generated after the exposure to the respective plasmas was lower at 5℃ and higher at 0℃. In particular, for the entire temperature range, about five times more contamination particles were generated with exposure to NF₃/O₂/Ar plasma than for exposure to CF₄/O₂/Ar plasma. Observation of the surface of the anodic oxide film showed that the pore size and density of the non-treated film sample increased with the increase of the temperature. The change of the surface after exposure to fluorine plasma was greatest at 0℃. The generation of contamination particles by fluorine plasma exposure for the anodic oxide film prepared in the present study was different from that of previous aluminum anodic oxide films.
#Fluorine plasma #Anodizing #Sulfuric acid #In-situ particle monitoring #Electrolyte temperature

목차

Abstract
Ⅰ. Introduction
Ⅱ. Experimental
Ⅱ. Results and Discussion
Ⅳ. Conclusions
References

참고문헌 (18)

참고문헌 신청
Huang, Yuelong, et al., Corrosion Science, 50(12), 3569-3575 (2008). Thamida, S. K., and Chang, H. C., Journal of Nonlinear Science, 12(1), 240-251 (2002). Lee, W., and Park, S. J., Chemical reviews, 114(15), 7487-7556 (2014). Zhang, J. S., Zhao, X. H., Zuo, Y., and Xiong, J. P., Surface and Coatings Technology, 202(14), 3149-3156 (2008).

함께 읽어보면 좋을 논문

논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!

이 논문의 저자 정보

최근 본 자료

전체보기

댓글(0)

0

UCI(KEPA) : I410-ECN-0101-2019-420-001276852