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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.6
- 발행연도
- 2017.11
- 수록면
- 189 - 194 (6page)
이용수
초록· 키워드
오류제보하기
Effects of gas injection scheme and rf driving current configuration in a dual turn inductively coupled plasma (ICP) system were analyzed by 3D numerical simulation using CFD-ACE+. Injected gases from a tunable gas nozzle system (TGN) having 12 horizontal and 12 vertical nozzles showed different paths to the pumping surface. The maximum velocity from the nozzle reached Mach 2.2 with 2.2 Pa of Ar. More than half of the injected gases from the right side of the TGN were found to go to the pump without touching the wafer surface by massless particle tracing method. Gases from the vertical nozzle with 45 degree slanted angle soared up to the hottest region beneath the ceramic lid between the inner and the outer rf turn of the antenna. Under reversed driving current configuration, the highest rf power absorption region were separated into the two inner islands and the four peaked donut region.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Experiment and Simulation Setup
Ⅲ. Results and Discussion
Ⅳ. Conclusions
References
참고문헌 (11)
참고문헌 신청
D. Seo and S. Chun, J. Kor. Inst. Surf. Eng., Vol. 45, No. 3, 121 (2012).
S. Lee, J. Kor. Vac. Soc., Vol 18, No. 3, 176 (2009).
K. Yang, S. Park, T. Shin, and G. Yeom, J. Kor. Inst. Surf. Eng., Vol. 48, No. 6, 360 (2015).
H. Park, J. Choi, M. Yun, and G. Kwon, J. Kor. Inst. Surf. Eng., Vol. 49, No. 1, 92 (2016).
B. Lee and G. Jeong, J. Kor. Inst. Surf. Eng., Vol. 48, No. 4, 163 (2015).
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UCI(KEPA) : I410-ECN-0101-2019-420-001276756