메뉴 건너뛰기
Library Notice
Institutional Access
If you certify, you can access the articles for free.
Check out your institutions.
ex)Hankuk University, Nuri Motors
Log in Register Help KOR
Subject
Humanities
General Humanities History Philosophy Religious Studies Linguistics and Literature Other Humanities
Social science
General Social Science Business Management Tourism Education Military Science Library and Information Science Law Sociology Journalism and Media Studies Psychological Science Political Science and Diplomacy Geography Public Administration Economics International Trade Anthropology Other Social Science
Natural science
General Natural Science Physics Biology Life Sciences Mathematics/Statistics Astronomy Earth Science Chemistry Other Natural Science
Engineering
General Engineering Architectural Engineering Mechanical Engineering Industrial Engineering Material/Energy Engineering Electrical and Electronic Engineering Marine and Ocean Engineering Chemical Engineering Computer Science Other Engineering
Medical science
General Medical Science Nursing Science Veterinary Pharmacy Traditional Korean Medicine Basic Medicine Clinical Medicine Other Medicine
Agriculture and Fishery
General Agriculture and Fishery Agriculture Fishery Science Food Science Forestry Animal Husbandry Marine Transportation Studies Other Agriculture and Fishery
Art and Kinesiology
General Arts Design Fine Arts Cosmetology Photography Music Fashion Kinesiology Performing Media Arts Other Arts and Kinesiology
Interdisciplinary Studies
Interdisciplinary Research Science and Technology Studies Brain and Cognitive Science Technology Policy Other Interdisciplinary Studies

KOR

Design of silicon-on-nothing structure based on multi-physics analysis
Recommendations
Search

논문 기본 정보

Type
Academic journal
Author
Song, Jihwan (Department of Mechanical Engineering, Sogang University) Zhang, Linan (Department of Mechanical Engineering, Hangzhou Dianzi University) Kim, Dongchoul (Department of Mechanical Engineering, Sogang University)
Journal
테크노프레스 Multiscale and multiphysics mechanics Multiscale and multiphysics mechanics 제1권 제3호
Published
2016.1
Pages
225 - 231 (7page)

Usage

cover
Design of silicon-on-nothing structure based on multi-physics analysis
Ask AI
Recommendations
Search

Abstract· Keywords

Report Errors
The formation of silicon-on-nothing (SON) structure during an annealing process from the silicon substrate including the trench structures has been considered as an effective technique to construct the structure that has an empty space under the closed flat surface. Previous studies have demonstrated the mechanism of the formation of SON structure, which is based on the surface diffusion driven by the minimization of their surface energy. Also, it has been fragmentarily shown that the morphology of SON structure can be affected by the initial design of trench (e.g., size, number) and the annealing conditions (e.g., temperature, pressure). Based on the previous studies, here, we report a comprehensive study for the design of the cavity-embedded structure (i.e., SON structure). To do this, a dynamic model has been developed with the phase field approach. The simulation results represent that the morphology of SON structures could be detailedly designed, for example the position and thickness of cavity, the thickness of top and bottom layer, according to the design parameters. This study will give us an advantage in the effective design of SON structures.
#SON structure #morphological design #phase field model #multi-physics analysis

Contents

No content found

References (0)

Add References
If the reference is being serviced by DBpia, please register through [Add Reference]

Recommendations

It is an article recommended by DBpia according to the article similarity. Check out the related articles!

Related Authors

Recently viewed articles

View more

Comments(0)

0

Write first comments.