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Pd nanogap hydrogen sensors were developed using an elastomeric substrate and operated through an on-off mechanism. A 10 nm thick Pd thin film was formed on a polydimethylsiloxane (PDMS) substrate, and 50% of the physical strain was applied in the longitudinal direction to fabricated uniform nanogaps. The initial concentration of the hydrogen gas for the PDMS/Pd films was controlled, and subsequently, the on-off switching response was measured. We found that the average nanogap was less than 50 nm, and the Pd nanogap hydrogen sensors operated over a wide range of temperatures. In particular, the sensors work properly even at a very low temperature of -40oC with a fast response time of 2s. In addition, we have investigated the relative humidity and annealing effects.
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참고문헌 (32)
참고문헌 신청
M. Kim / 2005 / The Era of Hydrogen Revolution / The Sallim Publisher :12~20
National Research Council (U.S.) / 2004 / The Hydrogen Economy : Opportunities, Costs, Barriers, and R&D Needs / The Natinal Academies Press :1~2
K. J. Liekhus / 2000 / Flammability of gas mixtures containing volatile organic compounds and hydrogen / J. Loss Prev. Process Ind 13:317~384
A. Hulanicki / 1991 / Chemical sensors definitions and classification / Pure Appl. Chem 63:1247~1250
T. Hübert / 2011 / Hydrogen sensors-A review / Sens. Actuators B 157(2):329~352
National Research Council (U.S.) / 2004 / The Hydrogen Economy : Opportunities, Costs, Barriers, and R&D Needs / The Natinal Academies Press :1~2
K. J. Liekhus / 2000 / Flammability of gas mixtures containing volatile organic compounds and hydrogen / J. Loss Prev. Process Ind 13:317~384
A. Hulanicki / 1991 / Chemical sensors definitions and classification / Pure Appl. Chem 63:1247~1250
T. Hübert / 2011 / Hydrogen sensors-A review / Sens. Actuators B 157(2):329~352
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