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자료유형
학술저널
저자정보
Masayuki Okoshi (National Defense Academy) Tsuyoshi Yoshida (National Defense Academy)
저널정보
대한금속·재료학회 Electronic Materials Letters Electronic Materials Letters Vol.17 No.1
발행연도
2021.1
수록면
68 - 73 (6page)

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A silicone rubber-based biochip for disinfection under deep-UV light exposure was successfully fabricated by an ArF excimerlaser. To fabricate the biochip, periodic micro-swelling structure of silicone rubber was photochemically formed bythe ArF excimer laser-induced photodissociation of Si–O bonds of silicone rubber. It was found that the growth rate of themicro-swelling structure could be controlled by varying the laser pulse repetition rate; a slow growth of roughly 100 ms andlonger per laser pulse was recognized. In addition, no change of each the micro-swelling height formed at various laser pulserepetition rates was also found in the range of 300–18,000 of laser pulse number. Using such the wide processing window,moreover, the periodic micro-swelling structure could be modified into photoluminescent property by long irradiation ofArF excimer laser, while maintaining the micro-swelling height. Blue photoluminescence from the modified micro-swellingstructure was observed under a deep-UV light exposure. Thus, each the periodic micro-swelling structure with various desiredheights could be bonded to a flat plate of fused silica glass to have equal gaps. A small amount of solution could be confined in the equal gap to disinfect virus/bacteria in the solution under deep-UV light for analytical application.

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