지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 1994.11
- 수록면
- 94 - 101 (8page)
이용수
초록· 키워드
오류제보하기
About vibration model of Six-degrees-of-freedom(DOF), in mass load, examined results for knowing dynamic interference and response variation is as follows ;
In case of putting mass load upon the object, experimented results on two-degrees-of-freedom of the translation-1 direction and the rotation-1 direction at open-loop-control system, about 0.19 arcsec on input of the translation-0.1㎛ and 0.022㎛ on input of the rotation-0.5 arcsec, the justicse of motion equation is acknowledged as confirming the appearance of the interlerence-0.022㎛.
In establishing calculation of transformation matrix by using analogue circuit, as simulating results that used incomplete differentiation, interference is 1.7 X 10^-3 arcsec on input of the translation-0.l㎛ and 1.4X 10⁴ ㎛ on input of the rotation-0.5 arcsec in open-loop-control system. Also it is 42X 10^-⁴ arcsec on input of the translation-0.1㎛ and 5.6X 10^-⁴㎛ on input of the rotation-0.5 arcsec in closed-loop-control system.
A￡ closed-loop-control system is better than open-loop-control system, equivalent accordance is coufirmed on original response.
Finally, fundamental validity of this theory is acknowledged.
In case of putting mass load upon the object, experimented results on two-degrees-of-freedom of the translation-1 direction and the rotation-1 direction at open-loop-control system, about 0.19 arcsec on input of the translation-0.1㎛ and 0.022㎛ on input of the rotation-0.5 arcsec, the justicse of motion equation is acknowledged as confirming the appearance of the interlerence-0.022㎛.
In establishing calculation of transformation matrix by using analogue circuit, as simulating results that used incomplete differentiation, interference is 1.7 X 10^-3 arcsec on input of the translation-0.l㎛ and 1.4X 10⁴ ㎛ on input of the rotation-0.5 arcsec in open-loop-control system. Also it is 42X 10^-⁴ arcsec on input of the translation-0.1㎛ and 5.6X 10^-⁴㎛ on input of the rotation-0.5 arcsec in closed-loop-control system.
A￡ closed-loop-control system is better than open-loop-control system, equivalent accordance is coufirmed on original response.
Finally, fundamental validity of this theory is acknowledged.
목차
ABSTRACT
1.서론
2.제어대상의 모델링
3.실험장치 및 실험결과
4.결론
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UCI(KEPA) : I410-ECN-0101-2009-556-014081901