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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 1994.2
- 수록면
- 98 - 101 (4page)
이용수
초록· 키워드
오류제보하기
White diamond thin film, which should be composed of almost pure diamond, could be successfully obtained under high pressure conditions(above 150 Torr) by means of MPECVD(microwave plasma enhanced chemical vapor deposition, ASTeX 1.5 ㎾). Characteristics of the films with varing experimental parameters have been examined. From the experimental results, we will discuss the surface morphology and the growth mechanism of the films.
목차
Abstract
Introduction
Experimental
Results and Discussion
Conclusions
References
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UCI(KEPA) : I410-ECN-0101-2009-554-018013370