Synthesis of White Diamond Thin Film by Microwave Plasma Enhanced Chemical Vapor Deposition Method

S.H.Kim ,  Y.S.Pa ,  k 외 2명

한국진공학회 학술발표회초록집

1994 .02

MICROWAVE PLASMA - ENHANCED CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF (001) HOMOEPITAXIAL DIAMOND FILMS

Naesung Lee

한국진공학회 학술발표회초록집

1998 .02

Low temperature growth of nanocrystalline diamond thin film by surface wave plasma chemical vapor deposition with various working pressures

Jong Seok KIM ,  Yeong Min PARK ,  Dae Weon KIM 외 6명

한국진공학회 학술발표회초록집

2016 .08

Effects of nitrogen introduced carbon nanotubes by using microwave plasma enhanced chemical vapor deposition

Yun Hee Kim ,  Ji Hoon Yang ,  Young Jin Lee 외 9명

한국진공학회 학술발표회초록집

2003 .08

금속중간층을 이용한 나노결정질 다이아몬드 박막 코팅

나봉권 ,  명재우 ,  강찬형

한국진공학회 학술발표회초록집

2013 .02

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Synthesis of Few-Layer Graphene on Ni Foil by Microwave Plasma Chemical Vapor Deposition

Y. S. Kim ,  W. Song ,  S. Y. Lee 외 4명

한국진공학회 학술발표회초록집

2009 .08

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition

Y. Kim ,  W. Song ,  S. Y. Lee 외 5명

한국진공학회 학술발표회초록집

2010 .02

Deposition of MgB2 Thin Films by using of Chemical Vapor Deposition

이정욱 ,  박규순 ,  남궁해 외 1명

한국진공학회 학술발표회초록집

2002 .06

Optical properties of silicon nitride films by plasma - enhanced chemical vapor deposition

Changhun Ko ,  Chlyoung Ham ,  Heesoo Han 외 6명

한국진공학회 학술발표회초록집

2004 .08

Stabilization of Direct Current Plasma and Large area diamond deposition

Jae-Kap Lee ,  Wook-Seong Lee ,  Young-Joon Baik 외 3명

한국진공학회 학술발표회초록집

1998 .07

Cu film growth on Si substrate by combining plasma enhanced chemical vapor deposition with partially ionized beam deposition

K. H. Kim ,  S. C. Choi ,  D. J. Choi 외 5명

한국진공학회 학술발표회초록집

1997 .07

Growth of carbon nanotubes on metal substrates using plasma - enhanced chemical vapor deposition

Se ,  ng-Ye ,  l Pa 외 9명

한국진공학회 학술발표회초록집

2002 .06

The Study on Synthesis and Characterization of Various Functional Materials by Physical Vapor Deposition and Chemical Vapor Deposition method

송용화 ,  조상진 ,  정충경 외 1명

한국진공학회 학술발표회초록집

2006 .02

Growth of Preferentially Oriented GaN Thin Films on Si Substrates Using A New Single Precursor by Metal Organic Chemical Vapor Deposition

Sang Hun Lee ,  Sung Yong Lee ,  Seung Ho Yoo 외 4명

한국진공학회 학술발표회초록집

2000 .07

Inorganic Thin Film Passivation Layer Fabricated by Plasma Enhanced Chemical Vapor Deposition

Bum-Hee Lee ,  Dong-Hee Pa ,  k 외 3명

한국진공학회 학술발표회초록집

2013 .02

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08