Mass production of high quality boron-doped nanocrystalline diamond by surface wave plasma CVD

Yeong Min PARK ,  Jeong Wan KIM ,  Qi DONG 외 4명

한국진공학회 학술발표회초록집

2016 .08

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Plasma Effect on Low Temperature Growth of Single-Walled Carbon Nanotubes in Plasma-Coupled Thermal Chemical Vapor Deposition

Sung-Il Jo ,  Goo-Hwan Jeong

한국진공학회 학술발표회초록집

2018 .08

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Novel synthesis of nanocrystalline thin films by design and control of deposition energy and plasma

Jeon G. Han

한국진공학회 학술발표회초록집

2016 .02

Double antireflection thin film by plasma enhanced chemical vapor deposition for silicon solar cell

Dongsung LEE

한국진공학회 학술발표회초록집

2016 .08

Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System

권정대 ,  남기석 ,  김동호

한국진공학회 학술발표회초록집

2015 .02

Fluid dynamic numerical analysis in graphene growth by chemical vapor deposition

Giwoon SUNG ,  Yinhua JIN ,  Taesung KIM

한국진공학회 학술발표회초록집

2016 .08

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Low-temperature synthesis of graphene structure using plasma-assisted chemical vapor deposition system

이병주 ,  정구환

한국진공학회 학술발표회초록집

2016 .02

Sensitivity of gate potentials and currents on nanocrystalline diamond transistors to morphology and activity of cells

Bohuslav REZEK ,  Ma ,  ie DAVIDKOVA 외 2명

한국진공학회 학술발표회초록집

2016 .08

Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma

Jonggu Han ,  Rodolphe Mauchauffé ,  Se Youn Moon

Applied Science and Convergence Technology

2023 .09

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Layer-by-layer deposition of chemical-vapor-deposition-grown graphenes

Daeyoon KIM ,  Jeong Kyun NOH ,  Jae-Hee HAN

한국진공학회 학술발표회초록집

2016 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

The comparative study of pure and pulsed DC plasma sputtering for synthesis of nanocrystalline Carbon thin films

Jin Xiang Piao ,  Manish Kuma ,  Amjed Javid 외 3명

한국진공학회 학술발표회초록집

2016 .02

Synthesis of hexagonal boron nitride using high-pressure chemical vapor deposition

Joonwon Lee ,  Jaehyun Han ,  Jong-souk Yeo

한국진공학회 학술발표회초록집

2017 .08

마이크로스트립 라인을 이용한 마이크로웨이브 플라즈마 기술 및 응용

김재호

진공이야기

2020 .09

Orientation Controlled Growth of Organic Polyurea Films by Molecular Layer Deposition

이혜미 ,  이진석

한국진공학회 학술발표회초록집

2018 .02