Inductively Coupled Plasma의 Numerical Simulation

주정훈

한국진공학회 학술발표회초록집

1998 .07

Dry etching of Al₂O₃ thin films in inductively coupled plasma system

Seok SON ,  Young Hee JOO ,  Chang Il KIM

한국진공학회 학술발표회초록집

2016 .08

Analysis of chemical reactions of CF₄ and C₄F₈ for inductively coupled plasma based on plasma parameters

J. J. Lee ,  S. J. Kim ,  Y. S. Lee 외 2명

한국진공학회 학술발표회초록집

2019 .08

Inductively Coupled Plasma 방전의 Global Modelling 과 Simulation

유광일 ,  윤남석 ,  황순모

한국진공학회 학술발표회초록집

1997 .07

Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System

Ju-Ho Kim ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2020 .08

Research on parallelization mechanism of inductively coupled plasma for large area plasma source

이장재 ,  김시준 ,  김광기 외 5명

한국진공학회 학술발표회초록집

2016 .02

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

Interpretation of current decrease during E - H mode transition in a cylindrical inductively coupled plasma

Jun-Hyeon Moon ,  Ho-Jun Moon ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2018 .08

Characterization of inductively coupled Ar/CH4 plasma using tuned single langmuir probe and fluid simulation

차주홍 ,  한문기 ,  김동현 외 2명

한국진공학회 학술발표회초록집

2015 .08

Charterization of large-area N₂/NH₃/SiH₄ inductively coupled plasma using fluid simulation

서권상 ,  김동현 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

Inductively Coupled Plasma Discharge Simulation for the Semiconductor Process Considering Impedance Calculation in 3D Asymmetric Structure

Yejin Shon ,  So ,  a Lee 외 3명

Applied Science and Convergence Technology

2020 .03

Investigation of Gas Injection Effect in Inductively Coupled Plasma with Fluorocarbon Plasma

Jinha Hwang ,  Minshik Kim ,  Keunju Pa 외 2명

한국진공학회 학술발표회초록집

2009 .02

Oxide 및 Nitride 고선택비 식각 공정에서의 CF4(CHF3)/O2/Ar inductively coupled pulsed plasmas

김희주 ,  신예지 ,  김교운 외 4명

한국진공학회 학술발표회초록집

2020 .02

Effects of the Capacitive Field in an Inductively Coupled Plasma Discharge

HeeHwan Choe

Applied Science and Convergence Technology

2017 .09

Modeling of Inductively Coupled High Density Plasma Processes for the Fabrication of Semiconductor Devices

Jai Kwang Shin ,  Jae Joon Oh ,  Seong Gu Kim 외 6명

한국진공학회 학술발표회초록집

1999 .02

Experimental investigation on the plasma generation efficiency and plasma parameters in inductively coupled plasmas with a serial and a parallel antenna

김태우 ,  강현주 ,  정진욱

한국진공학회 학술발표회초록집

2017 .08

Study on the electrical and optical diagnosis of electron temperatures according to conditions of plasma emission light intensity in inductively coupled plasma

Ye-Seul LEE ,  Jin-Woo CHOI ,  Tae-Hoon JO 외 3명

한국진공학회 학술발표회초록집

2016 .08

Si Fin etching using Cl₂/Ar Sync, Asynchronized Pulsed Inductively Coupled Plasmas

김희주 ,  김교운 ,  홍종우 외 2명

한국진공학회 학술발표회초록집

2020 .08

Internal Antenna를 이용한 Inductively Coupled Plasma내에서 발생된 이온의 존재비율 측정

조정희 ,  한승희 ,  이연희 외 3명

한국진공학회 학술발표회초록집

1999 .02

Plasma parameters variation in O₂ / He, Ar, Xe inductively coupled plasma as a function of mixing ratio

배근희 ,  유신재 ,  엄환섭 외 1명

한국진공학회 학술발표회초록집

2001 .07