Electrical and optical properties of Ga-doped ZnO thin films prepared by RF magnetron Co-sputtering systems

Nam-Jung KIM ,  Naeho SHIN ,  Chang-Su HWANG

한국진공학회 학술발표회초록집

2016 .08

Enhancement of photoluminescence and electrical properties of Ga - doped ZnO thin film grown on α - Al₂O₃(0001) single crystal substrate by RF magnetron sputtering through rapid thermal annealing

Jung-Cho ,  Jongbum Nah ,  Min-Seok Oh 외 3명

한국진공학회 학술발표회초록집

2001 .07

Al-doped ZnO thin film process optimization on glass with RF magnetron sputtering method

노영수 ,  이상엽 ,  최원국

한국진공학회 학술발표회초록집

2008 .08

The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering

G.C. Kim ,  H.H Jeon ,  S.J. Hwangboe 외 4명

한국진공학회 학술발표회초록집

2007 .08

Annealing effect on the properties of Eu-doped BaWO₄ thin films grown on glass substrates by RF magnetron sputtering

Shinho CHO

한국진공학회 학술발표회초록집

2016 .08

Characteristics of Ga doped ZnO Thin Films Deposited by RF Magnetron Sputtering with Base Pressure

Deok Kyu Kim

Applied Science and Convergence Technology

2019 .01

Structural and Electrical Properties of a-axis ZnO:Al Thin Films Grown by RF Magnetron Sputtering

봉성재 ,  김선보 ,  안시현 외 2명

한국진공학회 학술발표회초록집

2014 .02

Properties of ZnO:Ga thin films deposited by RF magnetron sputtering under various RF power

Deok Kyu Kim ,  Hong Bae Kim

Applied Science and Convergence Technology

2015 .11

Magnetic and Structural Studies on Fe Doped ZnO thin Films Deposited by RF Magnetron Sputtering

Soo-Young Seo ,  Chang-Ha Kwak ,  Seon-Hyo Kim

한국자기학회 학술연구발표회 논문개요집

2008 .12

Characterization of Al-doped ZnO thin film grown on buffer layer with RF magnetron sputtering method

노영수 ,  이상엽 ,  김태환 외 1명

한국진공학회 학술발표회초록집

2009 .02

The effect of ZnO buffer layer on the structural and electrical properties in the ZnO:(Al,P) thin films by the RF-magnetron sputtering

김창훈 ,  신승학 ,  이준형 외 2명

한국진공학회 학술발표회초록집

2017 .02

Effect of growth temperature of Ga doped ZnO thin films by pulsed DC magnetron sputtering

Juho Kim ,  Ki-Seok An ,  Sun Sook Lee 외 2명

한국진공학회 학술발표회초록집

2009 .02

Growth Behavior of Ga-Doped ZnO Thin Films on Au/SiNx/Si(001) Substrate Grown by RF Sputtering

김주현 ,  이무성 ,  강현철

한국진공학회 학술발표회초록집

2013 .02

Effects of annealing temperature on structural and optical properties of CdS Films prepared by RF magnetron sputtering

황동현 ,  안정훈 ,  손영국

한국진공학회 학술발표회초록집

2010 .08

Electrical properties of ZnO Thin Film Transistor with changing O₂ Flux grown by R.F magnetron sputtering

K. H. Pa ,  k ,  Yonghan Roh

한국진공학회 학술발표회초록집

2009 .08

RF Magnetron Sputtering를 이용한 a축 ZnO:Al 박막의 구조적, 전기적 특성 연구

Junyoung Kang ,  Hyeongsik Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2015 .02

RF 마그네트론 스퍼터링법으로 제작된 Ga-doped ZnO 박막의 공정압력에 따른 전기적, 광학적 특성

정성진 ,  김덕규 ,  김홍배

Applied Science and Convergence Technology

2012 .01

Effect of Ga-doping on the properties of ZnO f ilms grown on glass substrate at room temperature by radio frequency magnetron sputtering

G.C. Kim ,  S.K. Lee ,  J.S. Lee 외 4명

Applied Science and Convergence Technology

2008 .01

Structural Evolution of ZnO:Ga Thin Film on Profiled Substrate Grown by Radio Frequency Sputtering

J. H. Sun ,  J. H. Kim ,  B. G. Ahn 외 5명

한국진공학회 학술발표회초록집

2011 .02

Characterization of Al Doped ZnO Thin Films Prepared by RF Magnetron Sputtering Under Various Substrate Temperatures

Deok Kyu Kim ,  Hong Bae Kim

Applied Science and Convergence Technology

2014 .09