Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition

김경문 ,  윤순길 ,  정낙관

한국진공학회 학술발표회초록집

2020 .02

Epitaxial $SnO_2$ Thin Films on Sapphire($1\bar{1}02$) and ($11\bar{2}0$) Deposited by Atomic Layer Deposition

Kim ,  Dai-Hong ,  Hong 외 1명

한국결정학회 학술연구발표회

2007 .01

Characteristics of low-temperature at 80°C HfO2 deposited by ALD (Atomic Layer Deposition) and electrical properties of NMOS capacitor

Kyoung-Mun Kim ,  Soon-Gil Yoon ,  Nak-Kwan Chung

한국진공학회 학술발표회초록집

2019 .08

Effect of Post Deposition Annealing in N₂ Ambient on Electrical Properties of Atomic Layer Deposited HfO₂ Films on Si

Soonkon Kim ,  Byoungdeog Choi

한국진공학회 학술발표회초록집

2018 .08

Influence of O₂ Annealing on Electrical Characteristics of Atomic Layer Deposited HfO₂ thin Films on Si Substrate

Soonkon Kim ,  Byoungdeog Choi

한국진공학회 학술발표회초록집

2018 .08

Atomic Layer Deposition of HfO₂ Films on Ge

Young Joon Cho ,  Hyo Sik Chang

Applied Science and Convergence Technology

2014 .01

The Effects of Thermal Decomposition of Tetrakis-ethylmethylaminohafnium (TEMAHf) Precursors on HfO₂ Film Growth using Atomic Layer Deposition

Nam Khen Oh ,  Jin-Tae Kim ,  Jong-Ki Ahn 외 4명

Applied Science and Convergence Technology

2016 .05

Atomic Layer Deposited Metal Thin Films on T-shirts

Han-Bo-Ram Lee

한국진공학회 학술발표회초록집

2017 .08

Deposition and characterization of Ti - Al - N thin films deposited by plasma - assisted atomic layer deposition

Yong Ju Lee ,  Sang-Won Kang

한국진공학회 학술발표회초록집

2002 .06

Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition

Byung Kook Lee ,  Jae Ki Min ,  Sun Sook Lee 외 4명

한국진공학회 학술발표회초록집

2009 .08

Active ion doping technique on HfO₂-based atomic switch by inserting Cu layers

Woo-Young CHOI ,  Jin-Hong PARK

한국진공학회 학술발표회초록집

2016 .08

Electrical and structural properties of HfO₂ deposited by r.f magnetron sputter

youngbin Hong ,  Yongha Roh

한국진공학회 학술발표회초록집

2008 .08

Low Temperature Encapsulation-Layer Fabrication of Organic-Inorganic Hybrid Thin Film by Atomic Layer Deposition-Molecular Layer Deposition

김세준 ,  김홍범 ,  성명모

한국진공학회 학술발표회초록집

2013 .02

The effect of back electrode on electric properties of SnS thin film using atomic layer deposition

Hu weiguang ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2018 .02

Active ion doping technique on HfO₂ : based Atomic switch by inserting Cu layers

Woo-Young Choi ,  Jin-Hong Pa ,  k

한국진공학회 학술발표회초록집

2017 .02

범밀도함수론을 이용한 정방정계-HfO₂/Si의 계면 층 구조 연구

김대희 ,  서화일 ,  김영철

Applied Science and Convergence Technology

2009 .01

Atomic Layer deposition를 이용한 MoOx 박막 증착의 두께 변화 관찰

정민지

한국진공학회 학술발표회초록집

2018 .02

Room Temperature Deposition of ZrO₂ thin film by using UV - enhanced Atomic Layer Deposition

강문철 ,  성명모

한국진공학회 학술발표회초록집

2005 .02

Properties of HfSi_xO_y/HfO₂ film as a various Annealing Temperature

송유주 ,  박재경 ,  노용한

한국진공학회 학술발표회초록집

2008 .08

Fabrication of Conductive ZnO Thin Filn Using UV-Enhanced Atomic Layer Deposition

양다솜 ,  김홍범 ,  성명모

한국진공학회 학술발표회초록집

2012 .08