Silicon Micromachining

M. Esashi

International Conference on Electronics, Informations and Communications

1998 .01

A New Micromachining Technology Using ( 111 ) Silicon

Sang Woo Lee ,  Sang Jun Pa ,  k 외 1명

International Conference on Electronics, Informations and Communications

1998 .01

A New Sacrificial Oxide Layer and Design Consideration for Micromachining

Sung Sul Jung ,  Soon Kwan Hong ,  Sun Woo Pa 외 2명

대한전자공학회 기타 간행물

1992 .01

Fabrication of Fluid Element Using Silicon Micromachining and Performance Analysis Compared With Measurements

김태현 ,  조동일 ,  최해천 외 2명

대한전자공학회 학술대회

1997 .01

Surface Micromachining of Polysilicon Gyroscope Structures with Symmetrical Doping and TEOS Sacrificial Oxides

Chang Auck Choi ,  Won Ick Jang ,  Chang Seung Lee 외 5명

ICVC : International Conference on VLSI and CAD

1997 .01

Silicon Micro-probe Card Using Porous Silicon Micromachining Technology

Young-Min Kim ,  Ho-Cheol Yoon ,  Jong-Hyun Lee

[ETRI] ETRI Journal

2005 .08

A High-performance X/Y-axis Microaccelerometer Fabricated on SOI Wafer without Footing Using the Sacrificial Bulk Micromachining (SBM) Process

Hyoungho Ko ,  Jongpal Kim ,  Sangjun Pa 외 7명

제어로봇시스템학회 국제학술대회 논문집

2003 .10

Silicon Micromachined RF Components : Review

Jong-Gwan Yook

대한전자공학회 학술대회

1999 .06

Micromachined Inductors on Silicon Substrates

Hwan Hee. Lee ,  Jae Y. Pa ,  k

대한전자공학회 ISOCC

2005 .10

마이크로 3축 링 자이로스코프의 동역학

최상현 ,  김창부

한국소음진동공학회논문집

2002 .12

Feedback Loop Design for Micro Gyroscope

Woon Tahk Sung ,  Jin Woo Song ,  Sangkyung Sung 외 2명

제어로봇시스템학회 국제학술대회 논문집

2002 .10

PC1D SIMULATION FOR N+ FABRICATION OF N-TYPE BACK SURFACE IN CRYSTALLINE SILICON SOLAR CELL

Kyu Wan SONG ,  Kyung Yul RYU ,  Jae Woo CHOI 외 4명

AFORE

2011 .11

Demonstration of Robust Micromachined Jet Technology and Its Application to Realistic Flow Control Problems

Sung Pil Chang

Journal of Mechanical Science and Technology

2006 .04

2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발

석세영 ,  임근배

센서학회지

2015 .01

Performance Characteristics of a Silicon Micromachined Thermal Flow Sensor for Species of Gases

Sung-Cheoul Roh ,  Yong-Moon Choi

ICEIC : International Conference on Electronics, Informations and Communications

2006 .06

Bulk Micromachining 공정을 이용한 안테나 결합형 볼로미터 타입 THz 센서 제작

우해인 ,  이경일 ,  정헌상

대한전기학회 학술대회 논문집

2017 .07

음차자이로의 동적특성 연구

곽문규 ,  송명호

한국소음진동공학회논문집

2003 .02

Micromachining 기술을 이용한 micro mass flow sensor의 제작 ( The Fabrication of Micro Mass Flow Sensor by Micro-machining Technology )

어수해 ,  최세곤

대한전자공학회 학술대회

1987 .07

Micromachining 기술을 이용한 micro mass flow sensor의 제작

魚秀海 ,  崔世崑

대한전기학회 학술대회 논문집

1987 .07

Fabrication of a Nanometer-Scale Si Wire by Micromachining of a Silicon-on-Insulator Substrate

H. Fujii ,  S. Kanema ,  u 외 4명

International Conference on Electronics, Informations and Communications

1998 .01