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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제20권 제2호
- 발행연도
- 2019.1
- 수록면
- 92 - 98 (7page)
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In this paper, we presented the design and simulation results of a platinum meander–spiral combination micro heater for a zinc oxide ( ZnO) gas sensor. As a fi rst step, diff erent optimizations have been performed using a fi nite element analysis in order to obtain a compromise between maximum temperature, maximum homogeneity in active area and minimum power consumption. In the other hand, the eff ect of ZnO sensitive layer was studied.
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