Double Exposure Laser Interference Lithography for Pattern Diversity using Ultraviolet Continuous-Wave Laser

마용원; 박준한; 윤다희; 곽창열; 신보성

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자료유형: 학술저널

저자정보: 마용원 박준한 윤다희 곽창열 신보성

저널정보: 한국마이크로전자및패키징학회 마이크로전자 및 패키징학회지 마이크로전자 및 패키징학회지 제26권 제2호

발행연도: 2019.1

수록면: 9 - 14 (6page)

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초록· 키워드

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The newly discovered properties of periodic nanoscale patterns have increasingly sparked research interests in various fields. Along this direction, it is worth mentioning that there had been rare studies conducted on interference exposure, a method of creating periodic patterns. Additionally, these few studies seemed to validate the existence of only exact quadrangle shapes and dot patterns. This study asserted the formation of wavy patterns associated to using multiple exposures of the ratio of the first exposure intensity to the second exposure intensity. Such patterns were designed and constructed herein via overlapping of two Gaussian beams relative to certain rotation angles, and with a submicron structure fabricated based on a 360-nm continuous-wave laser. Results confirmed that the proposed double exposure laser interference lithography is able to create circular, elliptical and wavy patterns with no need for complex optical components.

참고문헌 (10)

참고문헌 신청

L. Wang / 2013 / Rapid Fabrication of Large-Area Periodic Structures by Multiple Exposure of Two-Beam Interference / J. Lightwave Technol 31(2):276

J. H. Park / 2018 / Laser interference lithography on non-planar surface for roll-to-roll process / Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII

A. F. Lasagni / 2017 / Laser interference patterning methods: Possibilities for high-throughput fabrication of periodic surface patterns / Adv. Opt. Techn. 6(3-4):265

G. M. Burrow / 2011 / Multi-beam interference advances and applications: nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures / Micromachines 2(2):221

M. Campbell / 2000 / Fabrication of photonic crystals for the visible spectrum by holographic lithography / Nature 404:53

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