The formation of highly ordered nano pores in Anodic Aluminum Oxide

Im, Wan-soon; Cho, Kyung-Chul; Cho, You-suk; Park, Gyu-Seok; Kim, Dojin

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자료유형: 학술대회자료

저자정보: Im, Wan-soon (Department of Materials Engineering, Chungnam National University) Cho, Kyung-Chul (Department of Materials Engineering, Chungnam National University) Cho, You-suk (Department of Materials Engineering, Chungnam National University) Park, Gyu-Seok (Department of Materials Engineering, Chungnam National University) Kim, Dojin (Department of Materials Engineering, Chungnam National University)

저널정보: 한국재료학회 한국재료학회 학술발표대회 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집

발행연도: 2003.1

수록면: 53 - 53 (1page)

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There has been increasing interest in the fabrication of nano-sized structures because of their various advantages and applications. Anodic Aluminum Oxide (AAO) is one of the most successful methods to obtain highly ordered nano pores and channels. Also It can be obtained diverse pore diameter, density and depth through the control of anodization condition. The three types of substrates were used for anodization; sheets of Aluminum on Si wafer and Aluminum on Mo-coated Si wafer. In Aluminum sheet, a highly ordered array of nanoholes was formed by the two step anodization in 0.3M oxalic acid solutions at 10$^{\circ}C$ After the anodization, the remained aluminum was removed in a saturated HgCl$_2$ solution. Subsequently, the barrier layer at the pore bottom was opened by chemical etching in phosphoric acid. Finally, we can obtain the through-channel membrane. In these processes, the effect of various parameters such as anodizing voltage, anodizing time, pore widening time and pre-heat treatment are characterized by FE-SEM (HITACH-4700). The pore size. density and growth rate of membrane are depended on the anodizing voltage and temperature respectively. The pore size is proportional to applied voltage and pore widening time The pore density can be controlled by anodizing temperature and voltage.

#Anodized aluminum oxide #membrane #nano channel

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