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지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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이 논문의 연구 히스토리 (4)
2017
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초록· 키워드
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The Electrostatic Charge Prevention Technology is a core factor that highly influences the yield of Ultra High Resolution Flat Panel Display and high-integrated semiconductor manufacturing processes. The corona or x-ray ionizations are commonly used in order to eliminate static charges during manufacturing processes. To develop such a revolutionary x-ray ionizer that is free of x-ray radiation and has function to control the volume of ion formation simultaneously is a goal of this research and it absolutely overcomes the current risks of x-ray ionization. Under the International Commission on Radiological Protection, it must have a leakage radiation level that should be lower than a recommended level that is $1{\mu}Sv/hour$. In this research, the new generation of x-ray ionizer can easily control both the volume of ion formation and the leakage radiation level at the same time. In the research, the test constraints were set and the descriptions are as below; First, In order not to leak x-ray radiation while testing, the shielding box was fully installed around the test equipment area. Second, Implement the metallic Ring Electrode along a tube window and applied zero to ${\pm}8kV$ with respect to manage the positive and negative ions formation. Lastly, the ion duty ratio was able to be controlled in different test set-ups along with a free x-ray leakage through the metallic Ring Electrode. In the result of experiment, the maximum x-ray radiation leakage was $0.2{\mu}Sv/h$. These outcome is lower than the ICRP 103 recommended value, which is $1{\mu}Sv/h$. When applying voltage to the metallic ring electrode, the positive decay time was 2.18s at the distance of 300 mm and its slope was 0.272. In addition, the negative decay time was 2.1s at the distance of 300 mm and its slope was 0.262. At the distance of 200 mm, the positive decay time was 2.29s and its slope was 0.286. The negative decay time was 2.35s and its slope was 0.293. At the distance of 100 mm, the positive decay time was 2.71s and its slope was 0.338. The negative decay time was 3.07s and its slope was 0.383. According to these research, the observation was shown that these new concept of ionizer is able to minimize the leakage radiation level and to control the positive and negative ion duty ratio while ionization.
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참고문헌 (12)
참고문헌 신청
Suzuki Seiden / 1992 / Clean Technology, 2, 31
Ministry of Commerce Industry and Energy / 2005 / Korean Agency for Technology and Standards the Sandard Study for Ionizer Evaluation Method
J. O. Shin / 2004 / A Study on Electrostatic Damage Free Technology in LCD Panels Manufacturing Process
J. G. Park / 2007 / A Basic Study for the Establishment of Electrostatic Management System in the Display Industry
J. C. Jung / 2008 / A Study on the Air Corona Discharge of a High Voltage Applied Statics Eliminator
Ministry of Commerce Industry and Energy / 2005 / Korean Agency for Technology and Standards the Sandard Study for Ionizer Evaluation Method
J. O. Shin / 2004 / A Study on Electrostatic Damage Free Technology in LCD Panels Manufacturing Process
J. G. Park / 2007 / A Basic Study for the Establishment of Electrostatic Management System in the Display Industry
J. C. Jung / 2008 / A Study on the Air Corona Discharge of a High Voltage Applied Statics Eliminator
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