지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
An Indium Zinc Oxide(IZO) transparent conductive layer was deposited on a large size glass substrate by using magnetron dc sputtering method with varying a deposition temperature. As the deposition temperature decreased to a room temperature, the sheet resistance of IZO film increased. But this deposition temperature range is included in an applicable to a device. From a standpoint of the sheet resistance, the differences of the sheet resistance were not great and the uniformity of the layer was uniformed around 10%. Crystallization particles were shown on the surface of the layer as deposition temperature increased, but these particles were not shown on the surface of the layer as deposition temperature decreased to the room temperature. It didn't make a scrap of difference in a transmittance of varying deposition temperature. Therefore, it is concluded that IZO thin film manufactured by the room temperature deposition condition can be used as a large size transparent conductive layer of a liquid crystal display device.
목차
Abstract
1. 서론
2. 실험
3. 결과 및 고찰
4. 결론
참고문헌
참고문헌 (14)
참고문헌 신청
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Indium Zinc Oxide 박막 특성에 대한 O 농도와 열처리 온도의 영향
공업화학
2006 .01
-
Effects of indium concentration in the indium zinc oxide (IZO) channel layer on the electrical performance of IZO-based TFTs
한국재료학회 학술발표대회
2007 .01
-
Properties of Indium Zinc Oxide Thin Films Prepared by Facing Targets Sputtering at Room Temperature
한국표면공학회 학술발표회 초록집
2008 .06
-
Crystallization Behaviors of Amorphous Indium Zinc Oxide(IZO) and Tin-doped IZO Thin Films During Heat Treatments
한국표면공학회 학술발표회 초록집
2008 .06
-
Changes in properties of ZnO:Al Films with deposition temperature fabricated by E-beam evaporation
한국재료학회 학술발표대회
2007 .01
-
Al이 첨가된 Zinc Oxide 투명전도막의 특성 연구 ( Properties Study of Al-Doped Zinc Oxide for Transparent Conductive Thin Film )
대한전자공학회 학술대회
1995 .01
-
Fabrication of Transparent Zinc Oxide Crystal Layers by Spin-Spray Method
한국표면공학회 학술발표회 초록집
2013 .11
-
원자층 증착공정의 저온 선택적 증착 특성을 이용한 유연성 기판용 AZO 투명전도막 증착 실험
대한설비공학회 학술발표대회논문집
2010 .11
-
The optical, electrical and structural properties in indium zinc oxide films deposited by LF magnetron sputtering
한국정보디스플레이학회 International Meeting
2006 .01
-
Characterization of Thin Films deposited at Low Temperature by using Atomic Layer Deposition and E-beam Evaporation
한국생산제조학회 학술발표대회 논문집
2014 .09
-
펄스레이저증착법으로 증착한 Indium Zinc Oxide 박막의 물성
전기전자재료학회논문지
2011 .01
-
Solution-processed Zinc Oxide Based Transparent Channel Layer for Thin Film Transistor
한국재료학회 학술발표대회
2007 .01
-
AN EXPERIMENTAL STUDY OF PARTICLE DEPOSITION DURING THE OUTSIDE VAPOR DEPOSITION PROCESS
KSME/JSME THERMAL and FLUID Engineering Conference
1996 .10
-
Atomic Layer Deposition for Displays Applications
인포메이션 디스플레이
2013 .01
-
Functional Polymer Thin Films based on the Layer-by-Layer Deposition
한국고분자학회 학술대회 연구논문 초록집
2006 .10
-
ITO와 AZO 동시 증착법으로 제조된 투명전도막의 특성 연구
한국표면공학회지
2009 .06
-
Solution-processed indium-zinc oxide with carrier-suppressing additives
Journal of information display
2012 .01
-
고효율 Silicon Heterojunction Solar Cell을 위한 Indium Tin Oxide 연구
신·재생에너지
2019 .09
-
DC 마그네트론 스퍼터링을 이용한 IZO 박막의 제조와 특성 연구
한국표면공학회지
2005 .10
-
OPTICAL PROPERTIES INDIUM OXIDE AND INDIUM TIN OXIDE FILMS PREPARED BY SPUTTERING
한국표면공학회지
1996 .12
이 논문의 저자 정보
이 논문과 함께 이용한 논문
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2009-581-015020183