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논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
Initial Study of Electron Temperature and Density Simulation on Capacitively Coupled RF He Plasma
한국진공학회 학술발표회초록집
2019 .08
Characteristics of SiO₂ Etching in a C4F8/Ar/O₂ pulse modulation capacitively coupled plasma
한국진공학회 학술발표회초록집
2018 .02
Bias Voltage experiment in Pulsed Dual-frequency CCP plasma
한국진공학회 학술발표회초록집
2015 .02
Control of spatial distribution of plasma density by the variable capacitor in a capacitively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
Effect of embedded pulse plasma on the etch of SiO₂ by varying the duty percentage
한국진공학회 학술발표회초록집
2016 .08
RF 축전 결합형 플라즈마 장비에서 발생하는 줄무늬의 형성 원리
새물리
2023 .09
Plasma Etching of Parylene and SU-8 Polymer in Capacitively Coupled O₂ Plasma
한국진공학회 학술발표회초록집
2019 .08
Analysis of the Characteristics of Radio Frequency Power Transmission Lines Using a Voltage Current Probe in Low-Pressure Discharge
Applied Science and Convergence Technology
2023 .09
Microtrenching of SiO₂ contact hole etching in C₄F8/Ar capacitively coupled plasma
한국진공학회 학술발표회초록집
2017 .08
Characterization of SiO₂ Over Poly-Si Mask Etching in Ar/C₄F8 Capacitively Coupled Plasma
Applied Science and Convergence Technology
2021 .11
Effects of pulsed inductively coupled Cl₂/Ar plasma for the etching of Si nanostructure
한국진공학회 학술발표회초록집
2020 .02
Characteristics of SiO₂ Etching by Capacitively Coupled Plasma with Different Fluorocarbon Liquids (C7F14, C7F8) and Fluorocarbon Gas (C₄F8)
Applied Science and Convergence Technology
2021 .07
Comparison of COMSOL Multiphysics Simulation and Langmuir Probe Characterization for Capacitively Coupled RF Ar Plasma Discharge
한국진공학회 학술발표회초록집
2019 .08
Development of an RF matching system in an RF inductively coupled plasma (ICP) source for 100 kW negative ion beam
한국진공학회 학술발표회초록집
2017 .08
2D GPU-PIC을 이용한 Capacitively Coupled Plasma 장비 내에서 발생하는 Micro-arc 현상 연구
한국진공학회 학술발표회초록집
2018 .02
Key issues in the design of innovative RF plasma sources
한국진공학회 학술발표회초록집
2016 .08
Effects of pulse modulation in Ar/H₂ inductively coupled plasma using fluid simulation
한국진공학회 학술발표회초록집
2017 .08
Low-Global Warming Potential Isomer Plasmas for Silicon Oxide Etching in Dual Frequency Superimposed Capacitively Coupled Plasmas
한국진공학회 학술발표회초록집
2021 .02
Using Pulse-Front Tilt to Measure Laser Pulses Less Than 100 Picoseconds in Duration
한국광학회지
2015 .12
Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
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