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Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2020 .02
Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2020 .02
Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride
한국진공학회 학술발표회초록집
2020 .08
Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2019 .08
Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source
한국진공학회 학술발표회초록집
2020 .02
Silicon nitride deposition by VHF (162 MHz)-PECVD using a multi-tile push-pull plasma source
한국진공학회 학술발표회초록집
2016 .08
Correlation Analysis of Plasma Optical Emission Spectra and Silicon Nitride Films Deposited in Inductively Coupled Plasmas
한국진공학회 학술발표회초록집
2021 .02
Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System
한국진공학회 학술발표회초록집
2015 .02
Photosensor based on ReS2 film synthesized by chemical vapor deposition
한국진공학회 학술발표회초록집
2020 .02
Silicon nitride deposition for flexible organic electronic devices by very high frequency plasma enhanced chemical vapor deposition using a multi-tile push-pull plasma source
한국진공학회 학술발표회초록집
2017 .02
Plasma enhanced atomic layer deposition of silicon nitride films using a VHF (162 ㎒) multi-tile push-pull plasma source
한국진공학회 학술발표회초록집
2020 .08
Layer-by-layer deposition of chemical-vapor-deposition-grown graphenes
한국진공학회 학술발표회초록집
2016 .08
Enhanced Anti-reflective Effect of SiNx/SiOx/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source
Applied Science and Convergence Technology
2016 .07
Double antireflection thin film by plasma enhanced chemical vapor deposition for silicon solar cell
한국진공학회 학술발표회초록집
2016 .08
Low Temperature PECVD process for SiNx/Organic Multilayer Thin Film Encapsulation
한국진공학회 학술발표회초록집
2017 .02
Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition
한국진공학회 학술발표회초록집
2015 .02
Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature
한국진공학회 학술발표회초록집
2016 .08
Synthesis of hexagonal boron nitride using high-pressure chemical vapor deposition
한국진공학회 학술발표회초록집
2017 .08
Investigation on solid-phase crystallization of amorphous silicon films
한국진공학회 학술발표회초록집
2016 .02
Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition
한국진공학회 학술발표회초록집
2018 .08
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