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Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature
한국진공학회 학술발표회초록집
2016 .08
Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD
한국진공학회 학술발표회초록집
2016 .02
Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System
한국진공학회 학술발표회초록집
2015 .02
Synthesis of silicon nitride thin film for high permeation barrier performance with RF power variation on hollow cathode RF PECVD
한국진공학회 학술발표회초록집
2018 .02
Synthesis of SiNx:H films in PECVD using RF/UHF hybrid sources
한국진공학회 학술발표회초록집
2015 .08
Low Temperature PECVD process for SiNx/Organic Multilayer Thin Film Encapsulation
한국진공학회 학술발표회초록집
2017 .02
Environmental reliability and barrier properties of SiOx, SiNx thin film by roll-to-roll PECVD system
한국진공학회 학술발표회초록집
2019 .08
PECVD Synthesis of WS₂ for Hydrogen Evolution Catalysis
한국진공학회 학술발표회초록집
2020 .02
Low Temperature PECVD for SiOx Thin Film Encapsulation
한국진공학회 학술발표회초록집
2016 .02
Low-Temperature Synthesis of Wafer Scale WS₂ by PECVD
한국진공학회 학술발표회초록집
2019 .02
Silicon nitride deposition by VHF (162 MHz)-PECVD using a multi-tile push-pull plasma source
한국진공학회 학술발표회초록집
2016 .08
Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2020 .02
Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2020 .02
Realization of efficient barrier performance of a silicon nitride film simply via plasma chemistry
한국진공학회 학술발표회초록집
2017 .02
Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride
한국진공학회 학술발표회초록집
2020 .08
Stabilization of Real-time Thickness monitoring system in PECVD chamber
한국진공학회 학술발표회초록집
2017 .08
Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition
한국진공학회 학술발표회초록집
2015 .02
VHF-PECVD for a-Si:H and a-SiN:H Film Deposition
Applied Science and Convergence Technology
2019 .09
Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride
한국진공학회 학술발표회초록집
2016 .08
Novel thermoelectric thin film nitrides by theory and experiments
한국진공학회 학술발표회초록집
2016 .08
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