Characteristics of Al-doped ZnO thin films prepared by sol-gel method

김용남; 이승수; 송준광; 노태민; 김정우; 이희수

추천

검색

자료유형: 학술저널

저자정보: 김용남 이승수 송준광 노태민 김정우 이희수

저널정보: 한국결정성장학회 한국결정성장학회지 한국결정성장학회지 제18권 제1호

발행연도: 2008.1

수록면: 50 - 55 (6page)

이용수

📌

연구주제

📖

연구배경

🔬

연구방법

🏆

연구결과

초록· 키워드

오류제보하기

Al-doped ZnO(AZO) thin films have been fabricated on glass substrate by sol-gel method, and the effect of Al precursors and post-annealing temperature on the characteristics of AZO thin films was investigated. The sol was prepared with zinc acetate, EtOH, MEA and Al recursors. In order to dope Al in ZnO, two types of aluminum nitrate and aluminum chloride were used as Al precursor. Zinc concentration was 0.5 mol/l and the content of Al precursor was 1 at% of Zn in the sol. The sol was spin-coated on glass substrate, and the coated films were annealed at 550℃ for 2 h and were post-annealed at temperature ranges of 300~500℃ for 2 h in reducing atmosphere (N₂/H₂ = 9/1). Structural, electrical and optical propertis of the fabricated AZO thin films were analyzed by XRD, FE-SEM, AFM, hall effect measurement system and UV-visible spectroscopy. Optical and electrical properties of AZO thin films prepared with aluminum nitrate as Al precursor were better than those of films prepared with aluminum chloride. The electrical resistivity and the optical transmittance of films decreased with increasing post-annealing temperatures. The minimum electrical resistivity of 2 × 10−3 Ω·cm and the maximum

#Al-doped ZnO #Sol-gel #Spin-coating #Al precursor #Post-annealing temperature #Resistivity #Transmittance

참고문헌 (21)

참고문헌 신청

A. Martin / 2002 / Prerparation of transparent and conductive Al-dopes ZnO thin films by ECR plasma enhanced CVD / Surface and Coatings Technology 151-152 : 289 ~

Andreas Pflug / 2004 / Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories / Thin Solid Films 455-456 : 201 ~

D.R. Sahu / 2007 / Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation / Thin Solid Films

H. Gomez-Pozos / 2007 / Effect of the [Al/Zn] ratio in the starting solution and deposition temperature on the physical properties of sprayed ZnO : Al thin films / Materials

Hong-ming Zhou / 2007 / Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties / Thin Solid Films 515 : 6909

함께 읽어보면 좋을 논문

논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!