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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.20 No.2
- 발행연도
- 2020.4
- 수록면
- 135 - 140 (6page)
- DOI
- 10.5573/JSTS.2020.20.2.135
이용수
초록· 키워드
오류제보하기
A combined square-shaped van der Pauw (VDP) sensor is proposed for calculation of the difference of the in-plane normal-stresses in this work. In previous works, two separate measurements were required, which is so inconvenient and tricky, because the different pair of point-contacts were used for 0 and/or 90 degree oriented resistance measurement. This work analytically presented how to resolve these problems by using a combined VDP configuration and compared the in-plane normal-stresses differential sensitivities for the different silicon planes and the coordinate systems (un-primed or primed). Furthermore, we offered another approach using the voltage difference, in which the sensitivity was observed to be linearly proportional to the unstressed value of voltage V<SUB>ref</SUB> (= I x R).
목차
Abstract
I. INTRODUCTION
II. BASIC THEORIES
III. CHIP DESIGN & ANALYSIS
IV. CONCLUSIONS
V. ACKNOWLEDGEMENTS
REFERENCES
참고문헌 (10)
참고문헌 신청
A. Mian et al., “The van der Pauw stress sensors,”, IEEE Sensors Journal, Vol. 6, no. 2, pp. 340-356, 2006
van der Pauw et al., “A method of measuring specific resistivity and Hall effect of discs of arbitrary shapes,” Philips Research Reports, Vol. 13, pp. 1-9, 1958
van der Pauw et al., “Determination of resistivity tensor and Hall tensor of anisotropic shape,” Philips Research Reports, Vol. 16, pp. 187-195, 1961
J. Hornstra et al., “Measurements of the resistivity constants of anisotropic conductors by means of plane-parallel discs of arbitrary shape,” Journal of Electronics and Control, Vol. 7, pp. 169-171, 1959
W. L. Price, “Extension of van der Pauw’s theorem for measuring specific resistivity in discs of arbitrary shape to anisotropic media,” Journal of Physics D: Applied Physics, Vol. 5, pp. 1127-1132, 1971
van der Pauw et al., “A method of measuring specific resistivity and Hall effect of discs of arbitrary shapes,” Philips Research Reports, Vol. 13, pp. 1-9, 1958
van der Pauw et al., “Determination of resistivity tensor and Hall tensor of anisotropic shape,” Philips Research Reports, Vol. 16, pp. 187-195, 1961
J. Hornstra et al., “Measurements of the resistivity constants of anisotropic conductors by means of plane-parallel discs of arbitrary shape,” Journal of Electronics and Control, Vol. 7, pp. 169-171, 1959
W. L. Price, “Extension of van der Pauw’s theorem for measuring specific resistivity in discs of arbitrary shape to anisotropic media,” Journal of Physics D: Applied Physics, Vol. 5, pp. 1127-1132, 1971
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