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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제21권 제2호
- 발행연도
- 2020.1
- 수록면
- 157 - 164 (8page)
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초록· 키워드
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In this paper, different material selection techniques like Ashby, TOPSIS and VIKOR have been used to select the best dielectric material for RF-MEMS switches with low power consumption. These methods help in choosing the optimum material from the available pool of materials. The dielectric material should be selected such that RF-MEMS capacitive switch should have good RF response, high thermal conductivity, low thermal coefficient of expansion, and low leakage current. For this purpose, the concerned material indices should have high value of relative permittivity, high value of electrical resistivity, low value of thermal coefficient of expansion, and high value of thermal conductivity. The presence of trade-offs led to no conclusive selection in case of Ashby’s method. Following Ashby’s method, TOPSIS and VIKOR method were used to select the optimum material. The end results suggest that TiO2 is the most suitable materials for shunt capacitive RF-MEMS switches.
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참고문헌 (15)
참고문헌 신청
J. Iannacci / 2017 / Journal of King Saud University-Science 29:436
E. R. Brown / 1998 / IEEE Transactions on Microwave Theory and Techniques 46:868
H. A. C. Tilmans / 2003 / Journal of Micromechanics Microengineering 13:139
G.M. Rebeiz / 2003 / RF MEMS: Theory, design, and technology / Wiley
M. Angira / 2015 / Microsystem Technologies 21:1447
E. R. Brown / 1998 / IEEE Transactions on Microwave Theory and Techniques 46:868
H. A. C. Tilmans / 2003 / Journal of Micromechanics Microengineering 13:139
G.M. Rebeiz / 2003 / RF MEMS: Theory, design, and technology / Wiley
M. Angira / 2015 / Microsystem Technologies 21:1447
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