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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제16권 제4호
- 발행연도
- 2015.1
- 수록면
- 173 - 178 (6page)
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초록· 키워드
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In lieu of the excellent radio frequency (RF) performance of microelectromechanical system ( MEMS) switches, these micro switches need higher actuation voltage for their operation. This requirement is secondary to concerns over the swtiches’ reliability. This paper reports high reliability operation of RF MEMS switches with low voltage requirements.
The proposed switch is optimised to perform in the Q-band, which results in actuation voltage of just 16.4 V. The mechanical stress gradient in the thin micro membrane is computed by simulating von Mises stress in a multi-physics environment that results in 90.4 MPa stress. The computed spring constant for the membrane is 3.02 N/m. The switch results in excellent RF performance with simulated isolation of above 38 dB, insertion loss of less than 0.35 dB and return loss of above 30 dB in the Q-band.
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참고문헌 (15)
참고문헌 신청
C. Ding / 2005 / / Proc. of the 2005 ASME International Mechanical Engineering Congress and Exposition : 1 ~ 4
C. L. Goldsmith / 1995 / / IEEE International MTT-S Symposium Digest 1 : 91 ~
C. O’Mahony / 2002 / / Journal of Micromechanics and Microengineering 12 : 438 ~
D. Peroulis / 2003 / / IEEE Transactions on Microwave Theory and Techniques 51 : 259 ~
G. M. Rebeiz / 2003 / RF MEMS: Theory, Design, and Technology / Wiley-Interscience
C. L. Goldsmith / 1995 / / IEEE International MTT-S Symposium Digest 1 : 91 ~
C. O’Mahony / 2002 / / Journal of Micromechanics and Microengineering 12 : 438 ~
D. Peroulis / 2003 / / IEEE Transactions on Microwave Theory and Techniques 51 : 259 ~
G. M. Rebeiz / 2003 / RF MEMS: Theory, Design, and Technology / Wiley-Interscience
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