Preparation of SiO₂Thin Film at Extremely Low Pressure Using Chemical Vapor Deposition

김무열 ,  김도현 ,  이종호 외 1명

한국진공학회 학술발표회초록집

2012 .08

RuO₂ 박막의 제조와 물성

서동주 ,  이재연 ,  김건호

Applied Science and Convergence Technology

1994 .12

Surface Analysis of RuO₂

Cha Yeon Kim ,  Tae Hyeong Kim ,  Jong Wan Lee 외 1명

한국진공학회 학술발표회초록집

1997 .02

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Fluorinated amorphous carbon thin films grown by plasma enhanced chemical vapor deposition with C₄F8 and Si₂H6 / He for low dielectric constant intermetallic layer dielectrics

Howoon Kim ,  Jang-Kyoo Shin ,  Dae-Hyuk Kwon 외 1명

Journal of Korean Vacuum Science & Technology

2003 .12

Preparation of Ga_0.03Zn_0.97-xMg_xO thin films by metal-organic chemical vapor deposition using ultrasonic nebulization

Choon-Ho LEE ,  Min-Seok CHOI

한국진공학회 학술발표회초록집

2016 .08

Preparation of Zn_1-xMn_xO thin films by metal-organic chemical vapor deposition using ultrasonic nebulization

Min-Seok CHOI ,  Choon-Ho LEE

한국진공학회 학술발표회초록집

2016 .08

Deposition of MgB2 Thin Films by using of Chemical Vapor Deposition

이정욱 ,  박규순 ,  남궁해 외 1명

한국진공학회 학술발표회초록집

2002 .06

Photoluminescence properties of a-plane GaN by metal-organic chemical vapor deposition

서용곤 ,  박재현 ,  서문석 외 3명

한국진공학회 학술발표회초록집

2009 .02

The Study on Synthesis and Characterization of Various Functional Materials by Physical Vapor Deposition and Chemical Vapor Deposition method

송용화 ,  조상진 ,  정충경 외 1명

한국진공학회 학술발표회초록집

2006 .02

Interfaces properties of low dielectric constant SiOC(-H) films deposited by plasma enhanced chemical vapor deposition

Chang Young Kim ,  Heang Seuk Lee ,  Jong Kwan Woo 외 1명

한국진공학회 학술발표회초록집

2009 .08

Effect of Thermal Annealing on the Agglomeration Behavior of Ru Thin Films Prepared by Metal-Organic Chemical Vapor Deposition

Kim ,  Beom-Seok ,  Kim 외 1명

한국결정학회 학술연구발표회

2007 .01

Chemical Vapor Deposition of Ga₂O₃ Thin Films on Si Substrates

Doo Hyun Kim ,  Seung Ho Yoo ,  Ki-Seok An 외 3명

한국진공학회 학술발표회초록집

2001 .02

Epitaxial growth of MoS₂ on c-sapphire by metal-organic chemical vapor deposition

Hokwon KIM ,  Dmit ,  y OVCHINNIKOV 외 4명

한국진공학회 학술발표회초록집

2016 .08

Preparation of Ba₁_xSrxTiO₃ thin films by metal - organic chemical vapor deposition and electrical properties

Jong-Guk Yoon ,  Soon-Gil Yoon ,  Won-Jae Lee 외 1명

Applied Science and Convergence Technology

1996 .03

Chemical Vapor Deposition with Single Precursors

Yunsoo Kim

한국진공학회 학술발표회초록집

1991 .07

Growth of Preferentially Oriented GaN Thin Films on Si Substrates Using A New Single Precursor by Metal Organic Chemical Vapor Deposition

Sang Hun Lee ,  Sung Yong Lee ,  Seung Ho Yoo 외 4명

한국진공학회 학술발표회초록집

2000 .07

Low temperature growth of nanocrystalline diamond thin film by surface wave plasma chemical vapor deposition with various working pressures

Jong Seok KIM ,  Yeong Min PARK ,  Dae Weon KIM 외 6명

한국진공학회 학술발표회초록집

2016 .08

Optical transitions in AlxGa₁-xN films grown by metal - organic chemical vapor deposition

Young Sin Pa ,  k ,  Hyeon Soo Kim 외 2명

한국진공학회 학술발표회초록집

2001 .02

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08