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Wafer Map Image Analysis Methods in Semiconductor Manufacturing System
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반도체 공정에서의 Wafer Map Image 분석 방법론

논문 기본 정보

Type
Academic journal
Author
Youngji Yoo (고려대학교) Daewoong An (SK 하이닉스) Seung Hwan Park (고려대학교) Jun-Geol Baek (고려대학교)
Journal
Korean Institute Of Industrial Engineers Journal of the Korean Institute of Industrial Engineers Vol.41 No.3 KCI Excellent Accredited Journal
Published
2015.6
Pages
267 - 274 (8page)

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Wafer Map Image Analysis Methods in Semiconductor Manufacturing System
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Abstract· Keywords

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In the semiconductor manufacturing post-FAB process, predicting a package test result accurately in the wafer testing phase is a key element to ensure the competitiveness of companies. The prediction of package test can reduce unnecessary inspection time and expense. However, an analysing method is not sufficient to analyze data collected at wafer testing phase. Therefore, many companies have been using a summary information such as a mean, weighted sum and variance, and the summarized data reduces a prediction accuracy. In the paper, we propose an analysis method for Wafer Map Image collected at wafer testing process and conduct an experiment using real data.
#Semiconductor #Wafer test #Package test #Wafer map image #Fail bit pattern

Contents

1. 서론
2. Wafer Map Image 분석 방법론
3. Wafer Map Image Data 분석
4. 결론
참고문헌

References (17)

Add References
[학술지(정기간행물)] - An, D. / 2009 / A Final Test Yields Prediction Methodology in the Semiconductor Manufacturing Process Using Stepwise Support Vector Machine / Journal of the Korean Institute of Industrial Engineers : 1 ~ 8 google schola [학술지(정기간행물)] - 안대웅 / 2009 / SSVM(Stepwise-Support Vector Machine)을 이용한 반도체 수율 예측 / 산업공학(IE interfaces) 22 (3) : 252 ~ 262 dbpia [학술지(정기간행물)] - Anon / 1995 / Research of TEST Trend for High density memory product google schola [보고서] - Baddeley, A. / 2008 / Analysing spatial point patterns in R google schola [학술지(정기간행물)] - Cleveland, W. S. / 1979 / Robust locally weighted regression and smoothing scatterplots / Journal of the American statistical association 74 (368) : 829 ~ 836 google schola

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