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논문 기본 정보

자료유형
학술저널
저자정보
Jonghwa Kim (Kookmin University) Sungju Choi (Kookmin University) Jaeman Jang (Kookmin University) Jun Tae Jang (Kookmin University) Jungmok Kim (Kookmin University) Sung-Jin Choi (Kookmin University) Dong Myong Kim (Kookmin University) Dae Hwan Kim (Kookmin University)
저널정보
대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.15 No.5
발행연도
2015.10
수록면
526 - 532 (7page)

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We quantitatively investigated instability mechanisms under simultaneous positive gate and drain bias stress (SPGDBS) in self-aligned top-gate amorphous indium-zinc-oxide thin-film transistors. After SPGDBS (V<SUB>GS</SUB>=13 V and V<SUB>DS</SUB>=13 V), the parallel shift of the transfer curve into a negative V<SUB>GS</SUB> direction and the increase of on current were observed. In order to quantitatively analyze mechanisms of the SPGDBS-induced negative shift of threshold voltage (ΔV<SUB>T</SUB>), we experimentally extracted the density-of-state, and then analyzed by comparing and combining measurement data and TCAD simulation. As results, 19% and 81% of ΔV<SUB>T</SUB> were taken to the donor-state creation and the hole trapping, respectively. This donor-state seems to be doubly ionized oxygen vacancy (V<SUP>o2+</SUP>). In addition, it was also confirmed that the wider channel width corresponds with more negative DVT. It means that both the donor-state creation and hole trapping can be enhanced due to the increase in self-heating as the width becomes wider. Lastly, all analyzed results were verified by reproducing transfer curves through TCAD simulation.

목차

Abstract
Ⅰ. INTRODUCTION
Ⅱ. DEVICE FABRICATION AND MEASUREMENT RESULTS
Ⅲ. DISCUSSION
Ⅳ. CONCLUSION
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