Correlation between Coil Configurations and Discharge Characteristics of a Magnetized Inductively Coupled Plasma

Hee-Woon Cheong

Journal of Magnetics

2016 .06

Ion Beam Etching (IBE) system에서의 Radical 제어 연구

김두산 ,  김건우 ,  장윤종 외 6명

한국진공학회 학술발표회초록집

2020 .08

300 mm wafer용 ICP dry etcher의 수치 모델링

주정훈 ,  김남헌

한국진공학회 학술발표회초록집

2015 .02

Magnetic Flux Density Distributions and Discharge Characteristics of a Newly Designed Magnetized Inductively Coupled Plasma

Hee-Woon Cheong

Journal of Magnetics

2015 .12

ICP dry etcher에서 세라믹 리드의 온도 조절에 의한 폴리머 증착 양상 수치 모델링

김한빛 ,  주정훈

한국진공학회 학술발표회초록집

2017 .08

Dry Etcher에서 ESC의 중요성

김남헌

한국진공학회 학술발표회초록집

2017 .08

A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System

Tae Hyung Kim ,  Geun Young Yeom

Applied Science and Convergence Technology

2019 .09

Etching of Ta₂O₅ thin films by inductively coupled plasma

Gwan-Ha Kim ,  KyuSung Heo

한국분석과학회 학술대회

2024 .11

Machine Learning-Based Prediction of Atomic Layer Control for MoS² via Reactive Ion Etcher

Changmin Kim ,  Seunghwan Lee ,  Muyoung Kim 외 3명

Applied Science and Convergence Technology

2023 .09

Characterization of SiO₂ Over Poly-Si Mask Etching in Ar/C₄F₈ Capacitively Coupled Plasma

In Ho Seong ,  Jang Jae Lee ,  Chul Hee Cho 외 3명

Applied Science and Convergence Technology

2021 .11

Diagnostics and modeling of inductively coupled methane plasma using the electrostatic probe and plasma simulations

차주홍 ,  이호준

한국진공학회 학술발표회초록집

2017 .02

Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas

홍영훈 ,  김주호 ,  이무현 외 2명

한국진공학회 학술발표회초록집

2020 .08

C₃F₆O 가스를 이용한 SiO₂에 대한 식각 특성 분석

김선웅 ,  양경채 ,  이호석 외 2명

한국진공학회 학술발표회초록집

2017 .08

Development of an RF matching system in an RF inductively coupled plasma (ICP) source for 100 kW negative ion beam

박민 ,  정봉기 ,  김태성 외 2명

한국진공학회 학술발표회초록집

2017 .08

Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C₄F₆-Mixture-Based Inductively Coupled Plasma Characteristics

Min Young Yoon ,  Hee Jung Yeom ,  Jong-Ryul Jeong 외 2명

Applied Science and Convergence Technology

2023 .03

Effects of pulse modulation in Ar/H₂ inductively coupled plasma using fluid simulation

서권상 ,  김동현 ,  이호준

한국진공학회 학술발표회초록집

2017 .08

Elemental analysis of rice using laser ablation inductively coupled plasma mass spectrometry(LA-ICP-MS)

Seyeon kim ,  Sung-Youn Kim ,  Dong-jin Kang 외 4명

한국분석과학회 학술대회

2022 .11

Pulsed Inductively Coupled Plasma Discharge Simulation for Semiconductor Processing in 2D Axisymmetric Structure

Yejin Shon ,  So ,  a Lee 외 3명

Applied Science and Convergence Technology

2020 .11

Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .11

High density micro ion beam by plasma ion source

Masaki SUGAWARA ,  Ha ,  uo KASAHARA 외 4명

한국진공학회 학술발표회초록집

2016 .08