Synthesis of hexagonal boron nitride using high-pressure chemical vapor deposition

Joonwon Lee ,  Jaehyun Han ,  Jong-souk Yeo

한국진공학회 학술발표회초록집

2017 .08

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Etching properties of titanium nitride thin films in a O₂/Cl₂/Ar plasma

Wang YIYU ,  Young-Hee JOO ,  Chang-Il KIM

한국진공학회 학술발표회초록집

2016 .08

Preparation of Zn_1-xMn_xO thin films by metal-organic chemical vapor deposition using ultrasonic nebulization

Min-Seok CHOI ,  Choon-Ho LEE

한국진공학회 학술발표회초록집

2016 .08

Preparation of Ga_0.03Zn_0.97-xMg_xO thin films by metal-organic chemical vapor deposition using ultrasonic nebulization

Choon-Ho LEE ,  Min-Seok CHOI

한국진공학회 학술발표회초록집

2016 .08

The development of effective physical vapor deposition for Polydimethylsiloxane polymers and its analysis

김현동 ,  강민성 ,  김병수 외 2명

한국분석과학회 학술대회

2022 .11

빗각 증착으로 제조한 질화 티타늄 박막의 조직 및 특성 변화

정재인 ,  양지훈 ,  김성환 외 2명

한국진공학회 학술발표회초록집

2017 .02

Layer-by-layer deposition of chemical-vapor-deposition-grown graphenes

Daeyoon KIM ,  Jeong Kyun NOH ,  Jae-Hee HAN

한국진공학회 학술발표회초록집

2016 .08

Improved device performance of boron-nitride-based thin-film transistors

Jun-Young JEON ,  Ban-Suk PARK ,  Anne HENRY 외 1명

한국진공학회 학술발표회초록집

2016 .08

Novel thermoelectric thin film nitrides by theory and experiments

Pe ,  EKLUND

한국진공학회 학술발표회초록집

2016 .08

Development of transition metal nitride hard coatings through the composition and processing control

Jyh-Wei LEE

한국진공학회 학술발표회초록집

2016 .08

Correlation Analysis of Plasma Optical Emission Spectra and Silicon Nitride Films Deposited in Inductively Coupled Plasmas

Seunghun Han ,  Byung hyun Oh ,  Yong soo Lim 외 1명

한국진공학회 학술발표회초록집

2021 .02

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Tin monosulfide thin films grown by atomic layer deposition using tetrakis(dimethylamino)tin for photovoltaic applications

Sang-Ju LEE ,  Shi-Joon SUNG ,  Yong Chan CHOI 외 2명

한국진공학회 학술발표회초록집

2016 .08

Molecular Layer Deposition of Titanium-Hydroquinone Complex Thin Films with Visible-Light Absorption

한규석 ,  송종수 ,  성명모

한국진공학회 학술발표회초록집

2015 .02