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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2009.1
- 수록면
- 411 - 414 (4page)
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초록· 키워드
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It has been investigated for the film uniformity and deposition rate of a-C:H films on glass substrate and polymeric materials in the presence of the modulated crossed magnetic field. We used Plasma CVD, i.e. using a crossed electromagnetic field, for uniform depositing thin film. The optimum discharge condition has been discussed for the gas pressure, the magnetic flux density and the distance between substrate and electrodes. As a result, it is found that the optimum discharge conditions are CH₄ concentration CH₄=10 %, modulated magnetic flux density B=48 Gauss, pressure P=100 mTorr, discharge power supply voltage V=1 kV under these experimental conditions. By using these experimental condition, it is possible to prepare the most uniform film extends over about 160 mm of the film width. In this study, we deposited a-C:H thin film on glass substrate, and have a plan that using this condition, study depositing a-C:H thin film on polymeric substrate in next studies.
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참고문헌 (8)
참고문헌 신청
D. Caschera / 2007 / Deposition of Ti-containing diamond-like carbon(DLC)films by PECVD technique / Materials Science and Engineering 27 (Iss5) : 1328 ~
G. Reisel / 2007 / Hydrogen containing DLC coatings on UHMW-PE deposited by r.f.-PECVD / Diamond and Related Materials 16 (Iss15) : 1370 ~
H. Fujiyama / 1998 / Ceramics inner coating of narrow tubes by a coaxial magnetron pulsed plasma / Surface and Coatings Technology 98 (Iss1) : 1467 ~
L. Ji / 2008 / Microstructure and mechanical properties of Mo/DLC nanocomposite films / Diamond and Related Materials 17 (Iss11) : 1949 ~
S. Meskinis / 2008 / Electrical and piezoresistive properties of ion beam deposited DLC films / Applied Surface Science 254 (Iss16) : 5252 ~
G. Reisel / 2007 / Hydrogen containing DLC coatings on UHMW-PE deposited by r.f.-PECVD / Diamond and Related Materials 16 (Iss15) : 1370 ~
H. Fujiyama / 1998 / Ceramics inner coating of narrow tubes by a coaxial magnetron pulsed plasma / Surface and Coatings Technology 98 (Iss1) : 1467 ~
L. Ji / 2008 / Microstructure and mechanical properties of Mo/DLC nanocomposite films / Diamond and Related Materials 17 (Iss11) : 1949 ~
S. Meskinis / 2008 / Electrical and piezoresistive properties of ion beam deposited DLC films / Applied Surface Science 254 (Iss16) : 5252 ~
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