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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제20권 제2호
- 발행연도
- 2019.1
- 수록면
- 154 - 164 (11page)
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This paper presents the design and performance analysis of radio frequency micro electro mechanical system switches having serpentine fl exure designs. In this paper, we have done, behavioral analysis by changing material, gap and thickness, increase in the actuation area using menders, impact of holes on eff ective working of the switch, stress analysis for low spring constant, electromechanical analysis for low pull-in voltage and high capacitance ratio, time dependent analysis for faster switching time, scattering parameter analysis for reducing RF losses are simulated and compared with the theoretical analysis. The signifi cant improvements in this work are lesser air gap and beam thickness reduced the pull-in voltage to 2.75 V for 1.66 μm displacement, a rapid switching time of 0.9 μs obtained through simulation, an improved capacitance ratio of 157.25, isolation is 49.59 dB, insertion loss is 0.005 dB. Actuation area is increased, and switch area is reduced to achieve the optimum performance of the switch.
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참고문헌 (16)
참고문헌 신청
P. Chawla / 2014 / Design, analysis and comparison of various MEMS switches for reconfi gurable planar antenna / Acta Polytech. Hung 11(10):21~40
Tejinder Singh / 2015 / Design and finite element modeling of series-shunt configuration based RF MEMS switch for high isolation operation in K–Ka band / Journal of Computational Electronics 14(1):167~179
Tejinder Singh / 2013 / Effective Stress Modeling of Membranes Made of Gold and Aluminum Materials Used in Radio-Frequency Microelectromechanical System Switches / Transactions on Electrical and Electronic Materials 14(4):172~176
A.K. Sharma / 2013 / Switching time analysis for non-uniform serpentine flexure based RF-MEMS switches / IEEE
T. Lakshmi Narayana / 2017 / Design and analysis of CPW based shunt capacitive RF MEMS switch / Cogent Engineering 4(1):1363356
Tejinder Singh / 2015 / Design and finite element modeling of series-shunt configuration based RF MEMS switch for high isolation operation in K–Ka band / Journal of Computational Electronics 14(1):167~179
Tejinder Singh / 2013 / Effective Stress Modeling of Membranes Made of Gold and Aluminum Materials Used in Radio-Frequency Microelectromechanical System Switches / Transactions on Electrical and Electronic Materials 14(4):172~176
A.K. Sharma / 2013 / Switching time analysis for non-uniform serpentine flexure based RF-MEMS switches / IEEE
T. Lakshmi Narayana / 2017 / Design and analysis of CPW based shunt capacitive RF MEMS switch / Cogent Engineering 4(1):1363356
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