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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제17권 제3호
- 발행연도
- 2016.1
- 수록면
- 129 - 133 (5page)
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초록· 키워드
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Theoretical and graphical analysis of pull-in-voltage and figure of merit for a fixed-fixed capacitive MicroElectromechanical Systems (MEMS) switch is presented in this paper. MEMS switch consists of a thin electrodecalled bridge suspended over a central line and both ends of the bridge are fixed at the ground planes of a coplanarwaveguide (CPW) structure. A thin layer of dielectric material is deposited between the bridge and centre conductorto avoid stiction and provide low impedance path between the electrodes. When an actuation voltage is appliedbetween the electrodes, the metal bridge acquires pull in effect as it crosses one third of distance between them. Inthis study, we describe behavior of pull-in voltage and figure of merit (or capacitance ratio) of capacitive MEMS switchfor five different dielectric materials. The effects of dielectric thicknesses are also considered to calculate the valuesof pull-in-voltage and capacitance ratio. This work shows that a reduced pull-in-voltage with increase in capacitanceratio can be achieved by using dielectric material of high dielectric constant above the central line of CPW.
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참고문헌 (15)
참고문헌 신청
G. M. Rebeiz / 2003 / RF MEMS Theory, Design, and Technology / J. Wiley & Sons
F. Lin / 2014 / Wireless Research Collaboration Symposium (NWRCS), 2014 National :11~14
Kagan Topalli / 2009 / EMPIRICAL FORMULATION OF BRIDGE INDUCTANCE IN INDUCTIVELY TUNED RF MEMS SHUNT SWITCHES / Progress In Electromagnetics Research 97:343~356
A. Kundu / 2013 / Journal of Micomechanics and Microengineering 22:045004
Rajesh Saha / 2016 / Design and characterization of a tunable patch antenna loaded with capacitive MEMS switch using CSRRs structure on the patch / Alexandria Engineering Journal 55(3):2621~2630
F. Lin / 2014 / Wireless Research Collaboration Symposium (NWRCS), 2014 National :11~14
Kagan Topalli / 2009 / EMPIRICAL FORMULATION OF BRIDGE INDUCTANCE IN INDUCTIVELY TUNED RF MEMS SHUNT SWITCHES / Progress In Electromagnetics Research 97:343~356
A. Kundu / 2013 / Journal of Micomechanics and Microengineering 22:045004
Rajesh Saha / 2016 / Design and characterization of a tunable patch antenna loaded with capacitive MEMS switch using CSRRs structure on the patch / Alexandria Engineering Journal 55(3):2621~2630
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