지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.23 No.1
- 발행연도
- 2023.2
- 수록면
- 71 - 78 (8page)
- DOI
- 10.5573/JSTS.2023.23.1.71
이용수
초록· 키워드
오류제보하기
We study the effects of oxygen content in indium-gallium-zinc oxide (IGZO) thin films on the output characteristics of IGZO thin-film transistors (TFTs) under high current driving conditions. Output curves were characterized at a high gate-to-source voltage (= 40 V) from both oxygen-rich and oxygen-poor IGZO TFTs. Characterization results showed that the drain current (ID) decreased with an increase in the drain-to-source voltage (VDS) under high-VDS conditions in the oxygen-rich IGZO TFTs, but abruptly increased with VDS in the oxygen-poor IGZO TFTs. From the detailed analysis of the transfer and capacitance-voltage curves obtained after output curve characterization by varying the VDS sweep range, the abnormal behavior of the output curves was mainly attributed to the increased number of trapped electrons within the gate dielectric and that of the doubly ionized oxygen vacancies in IGZO during the output curve characterization at high VDSs in oxygen-rich and oxygen-poor IGZO TFTs, respectively. The abnormality of the output curve was more significant in a wider channel device in both TFTs, which was attributed to the increased device temperature due to the self-heating effects.
목차
Abstract
I. INTRODUCTION
II. EXPERIMENTAL DETAILS
III. RESULTS AND DISCUSSION
IV. CONCLUSIONS
REFERENCES
참고문헌 (25)
참고문헌 신청
T. Kamiya et al., “Present status of amorphous In-Ga-Zn-O thin-film transistors,” Science and Technology of Advanced Materials, Vol. 11, No. 4, Nov., 2010.
A. Nathan et al., “Transparent oxide semiconductors for advanced display applications,” Information Display, Vol. 29, No. 1, pp. 6-11, Jan., 2013.
T. Kamiya et al., “Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping,” Journal of Display Technology, Vol. 5, No. 7, pp. 273-288, Dec., 2009.
K. Nomura et al., “Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors,” Nature, Vol. 432, No. 7016, pp. 488-492, Nov., 2004.
K. Nomura et al., “Amorphous oxide semiconductors for high-performance flexible thinfilm transistors,” Japanese Journal of Applied Physics, Vol. 45, No. 5B, pp. 4303-4308, May, 2006.
A. Nathan et al., “Transparent oxide semiconductors for advanced display applications,” Information Display, Vol. 29, No. 1, pp. 6-11, Jan., 2013.
T. Kamiya et al., “Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping,” Journal of Display Technology, Vol. 5, No. 7, pp. 273-288, Dec., 2009.
K. Nomura et al., “Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors,” Nature, Vol. 432, No. 7016, pp. 488-492, Nov., 2004.
K. Nomura et al., “Amorphous oxide semiconductors for high-performance flexible thinfilm transistors,” Japanese Journal of Applied Physics, Vol. 45, No. 5B, pp. 4303-4308, May, 2006.
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Effects of Indium Composition Ratio on Electrical Stability of Top-gate Self-aligned Coplanar IGZO TFTs under Self-heating Stress Conditions
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2024 .08
-
Channel Defect Analysis Method of a-IGZO TFTs on Polyimide for Flexible Displays
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2020 .10
-
Approaches to Improve Mobility and Stability of IGZO TFTs: A Brief Review
Transactions on Electrical and Electronic Materials
2024 .08
-
기판 바이어스로 형성된 산소공공을 통한 안정적인 IGZO:N 박막 트랜지스터 공정
대한전자공학회 학술대회
2021 .06
-
TFT 채널 층 IGZO박막의 Yttrium 도핑에 따른 전기적 특성 개선
한국표면공학회 학술발표회 초록집
2015 .05
-
a-IGZO TFT의 어닐링 가스 조건에 따른 전기적 특성 및 신뢰성 연구
대한전자공학회 학술대회
2024 .11
-
Effects of Oxygen Injection Rates on a-IGZO Thin-film Transistors with Oxygen Plasma Treatment
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2021 .06
-
Quantitative Analysis of Channel Width Effects on Electrical Performance Degradation of Top-gate Self-aligned Coplanar IGZO Thin-film Transistors under Self-heating Stresses
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2023 .02
-
The Amorphous Oxide Semiconductor Thin Film Transistors a-GIZO TFT Device Simulation, Neural Modeling and Validation of Model
Transactions on Electrical and Electronic Materials
2021 .10
-
Improved sensing properties by pre-bias on the IGZO TFTS gas sensor
대한전자공학회 학술대회
2019 .06
-
Effects of Plasma Treatment on the Reliability of a-IGZO TFT
전기전자재료학회논문지
2021 .01
-
High Gate Voltage 또는 High Drain Voltage의 PBS 조건에서 Oxygen Flow Rate에 따른 TFT의 신뢰성 분석
대한전자공학회 학술대회
2015 .06
-
음 바이어스 스트레스를 받은 졸-겔 IGZO 박막 트랜지스터를 위한 효과적 양 바이어스 회복
센서학회지
2019 .01
-
Flexible한 기판 표면 거칠기에 따른 초박형 비정질 IGZO TFT의 전기적 특성 및 안정성 개선
한국표면공학회 학술발표회 초록집
2018 .06
-
Flexible a-IGZO TFT 소자의 Tensile Stress에 따른 Sub-gap DOS 분석
대한전자공학회 학술대회
2020 .08
-
게이트 바이어스에 의한 a-IGZO 박막 트랜지스터 전기적 특성의 열화현상 분석
전기전자재료학회논문지
2021 .01
-
a-IGZO TFT를 이용한 D FlipFlop 설계
대한전자공학회 학술대회
2017 .06
-
Poly (4-vinylphenol) 게이트 절연체를 적용한 IGZO TFT의 열처리 온도에 따른 전기적 특성 분석
반도체디스플레이기술학회지
2017 .01
-
Effects of Ultrasonication on the Electrical Performance of a-IGZO TFTs
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2021 .04
-
Investigation on Contact Resistance of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors with Various Electrodes by Transmission Line Method
Transactions on Electrical and Electronic Materials
2015 .01
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2023-569-000401412