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논문 기본 정보

자료유형
학술대회자료
저자정보
Chien-Sheng Liu (National Cheng Kung University) Kun-Cheng Jiang (National Cheng Kung University) Ming-Fu Chen (National Applied Research Laboratories) Po-Ming Lin (National Applied Research Laboratories)
저널정보
전력전자학회 ICPE(ISPE)논문집 ICPE 2023-ECCE Asia
발행연도
2023.5
수록면
2,312 - 2,317 (6page)

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초록· 키워드

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The accuracy and stability of the laser are affected not only by the external environment, but also by laser structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) fluctuation errors. To reduce the laser fluctuation errors and improve laser quality, this study proposes a high-bandwidth 4-DOF fast steering mirror (FSM) with double Porro prisms driven by a voice coil motor (VCM), and has the advantage of shorter optical path length, fewer elements, and easier set-up at different locations in laser beam stabilization. The proposed 4-DOF FSM is verified by using the finite element analysis software ANSYS and MATLAB/Simulink. The proposed 4-DOF FSM has the movement range of ±0.1 mm and ±5 mrad along X and Y axis, respectively; the open-loop bandwidths of translational part and rotational part are 111 Hz and 113 Hz, respectively; and the closed-loop bandwidths of translational part and rotational part are 371 Hz and 379 Hz, respectively.

목차

Abstract
I. INTRODUCTION
II. DESIGN OF 4-DOF FSM
III. SIMULATION OF 4-DOF FSM
IV. CONCLUSION
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