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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Journal of Korean Vacuum Science & Technology Journal of Korean Vacuum Science & Technology Vol.6 No.4
- 발행연도
- 2002.12
- 수록면
- 143 - 148 (6page)
이용수
초록· 키워드
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Method of plasma-immersion ion deposition of hydrogenated DLC films on relatively thick flat dielectric substrates from plasma of not-self-sustained low-pressure gas arc discharge is suggested. Coating properties have been investigated experimentally, average energy per a deposited carbon atom depending on discharge current has been calculated. Optimum deposition parameters for obtaining sufficiently hard and transparent high-adhesive a-C:H films on a 4-㎜ thick glass substrates have been determined. Possibility to use these coatings for photo-tools protection from abrasion wear at low operating loads is shown in general.
목차
Abstract
1. Introduction
2. Experimental
3. Results and Discussion
4. Conclusions
Acknowledgements
Reference
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