Electrical properties of HfO_xN_y thin films deposited by PECVD

J.-H. Pa ,  k ,  J.-S. Hyun 외 2명

한국진공학회 학술발표회초록집

2006 .02

Photoluminescence chracteristics of SiN_x thin film deposited by PECVD at low temperature

Kyungsu Lee ,  Eunkyeom Kim ,  Kyongmin Kim 외 9명

한국진공학회 학술발표회초록집

2008 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

Study on Synthesis and Analysis of Organic-Inorganic Hybrid polymer Thin films by PECVD for Low-k materials

S.-J. Cho ,  I.-S. bae ,  J.-H. Boo

한국진공학회 학술발표회초록집

2007 .02

Synthesis and Characterization of Cyclohexene Polymer Thin Films by PECVD Method.

L-S. Bae ,  C. K. Jung ,  Y. S. Pa 외 5명

한국진공학회 학술발표회초록집

2004 .08

Synthesis and Characterization of Cyclohexene Polymer Thin Films by PECVD Method

I.-S. Bae ,  C. K. Jung ,  S. J. Cho 외 1명

한국진공학회 학술발표회초록집

2005 .02

PECVD로 증착한 Ta₂O5 박막의 전기적 특성 Electrical Characterization of Ta₂O5 Thin Films Deposited by PECVD.

김선우 ,  김형준

한국진공학회 학술발표회초록집

1992 .07

Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System

권정대 ,  남기석 ,  김동호

한국진공학회 학술발표회초록집

2015 .02

Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD

Jae Eun Kim ,  Kyung Dong Lee ,  Yoonmook Kang 외 2명

한국진공학회 학술발표회초록집

2016 .02

A study for the hybrid low-k polymer thin films by PECVD and their electrical and mechanical properties

배인섭 ,  조상진 ,  부진효

한국진공학회 학술발표회초록집

2007 .08

Preparation and Characterization of DLC Films on Si - wafer using Organic Compounds by PECVD

Chun Min-Seung ,  Jong Gi Jee

한국진공학회 학술발표회초록집

1996 .02

Characterization of PECVD SiN silicon photonics waveguide material for optical micro-ring resonator

Seokyeon HWANG ,  Minhee LEE ,  Sungchul KIM 외 1명

한국진공학회 학술발표회초록집

2016 .08

Characterization of microcrystalline silicon thin films prepared by a layer - by - layer technique with a PECVD system

C. O. Kim ,  T. U. Nahm ,  J. P. Hong

Journal of Korean Vacuum Science & Technology

1999 .10

Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition

Byung Kook Lee ,  Jae Ki Min ,  Sun Sook Lee 외 4명

한국진공학회 학술발표회초록집

2009 .08

PECVD로 증착된 Silicon Nitride 박막의 특성연구

이중환 ,  권오준 ,  전무식 외 1명

한국진공학회 학술발표회초록집

1992 .07

Low-temperature PECVD silicon nitride film for the fabrication of capacitance type pressure sensor

Kyeong-Keun CHOI ,  Kee JONG ,  Jeong-Yoon LEE 외 1명

한국진공학회 학술발표회초록집

2016 .08

A comparative study of plasma polymerized organic thin films on electrical, optical and physical properties for gate dielectric layer

서현진 ,  황기환 ,  주동우 외 7명

한국진공학회 학술발표회초록집

2014 .08

Plasma Polymerized Organic Thin Films and Comparison on their Physical and Electrochemical Properties

S.-H. Cho ,  Y.-J. You ,  M.-C. Kim 외 3명

한국진공학회 학술발표회초록집

2002 .02

Characterization of In-Situ Film Thickness and Chamber Condition of Low-K PECVD Process with Impedance Analysis

Daekyoung Kim ,  Haegyu Jang ,  Yongtae Kim 외 2명

한국진공학회 학술발표회초록집

2010 .02

TiN 박막제조를 위한 PECVD 공정의 해석적 연구

안경한 ,  설용건 ,  김선효

한국진공학회 학술발표회초록집

1992 .07