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Electrical properties of HfOxNy thin films deposited by PECVD
한국진공학회 학술발표회초록집
2006 .02
Photoluminescence chracteristics of SiNx thin film deposited by PECVD at low temperature
한국진공학회 학술발표회초록집
2008 .02
Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature
한국진공학회 학술발표회초록집
2016 .08
Study on Synthesis and Analysis of Organic-Inorganic Hybrid polymer Thin films by PECVD for Low-k materials
한국진공학회 학술발표회초록집
2007 .02
Synthesis and Characterization of Cyclohexene Polymer Thin Films by PECVD Method.
한국진공학회 학술발표회초록집
2004 .08
Synthesis and Characterization of Cyclohexene Polymer Thin Films by PECVD Method
한국진공학회 학술발표회초록집
2005 .02
PECVD로 증착한 Ta₂O5 박막의 전기적 특성 Electrical Characterization of Ta₂O5 Thin Films Deposited by PECVD.
한국진공학회 학술발표회초록집
1992 .07
Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System
한국진공학회 학술발표회초록집
2015 .02
Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD
한국진공학회 학술발표회초록집
2016 .02
A study for the hybrid low-k polymer thin films by PECVD and their electrical and mechanical properties
한국진공학회 학술발표회초록집
2007 .08
Preparation and Characterization of DLC Films on Si - wafer using Organic Compounds by PECVD
한국진공학회 학술발표회초록집
1996 .02
Characterization of PECVD SiN silicon photonics waveguide material for optical micro-ring resonator
한국진공학회 학술발표회초록집
2016 .08
Characterization of microcrystalline silicon thin films prepared by a layer - by - layer technique with a PECVD system
Journal of Korean Vacuum Science & Technology
1999 .10
Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition
한국진공학회 학술발표회초록집
2009 .08
PECVD로 증착된 Silicon Nitride 박막의 특성연구
한국진공학회 학술발표회초록집
1992 .07
Low-temperature PECVD silicon nitride film for the fabrication of capacitance type pressure sensor
한국진공학회 학술발표회초록집
2016 .08
A comparative study of plasma polymerized organic thin films on electrical, optical and physical properties for gate dielectric layer
한국진공학회 학술발표회초록집
2014 .08
Plasma Polymerized Organic Thin Films and Comparison on their Physical and Electrochemical Properties
한국진공학회 학술발표회초록집
2002 .02
Characterization of In-Situ Film Thickness and Chamber Condition of Low-K PECVD Process with Impedance Analysis
한국진공학회 학술발표회초록집
2010 .02
TiN 박막제조를 위한 PECVD 공정의 해석적 연구
한국진공학회 학술발표회초록집
1992 .07
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