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A study on mechanical role of pad surface structures in chemical-mechanical polishing pads
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화학적기계연마 패드 표면 구조의 기계적 역할에 대한 고찰

논문 기본 정보

Type
Proceeding
Author
Sanha Kim (한국과학기술원)
Journal
The Korean Society of Mechanical Engineers 대한기계학회 춘추학술대회 대한기계학회 생산 및 설계공학 부문 2022년도 춘계학술대회
Published
2022.5
Pages
2 - 2 (1page)

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A study on mechanical role of pad surface structures in chemical-mechanical polishing pads
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Research history (2)

2022

A study on mechanical role of pad surface structures in chemical-mechanical polishing pads
Sanha Kim 대한기계학회 춘추학술대회 2022.05 Proceeding

2019

A Study on the Mechanical Role of Soft Pad Asperities in Chemical-Mechanical Polishing
Sanha Kim 한국정밀공학회 학술발표대회 논문집 2019.05 Proceeding
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